| Display title | Specific Process Knowledge/Thin film deposition/ALD Picosun R200/Al2O3 deposition using ALD |
| Default sort key | Specific Process Knowledge/Thin film deposition/ALD Picosun R200/Al2O3 deposition using ALD |
| Page length (in bytes) | 26,457 |
| Namespace ID | 0 |
| Page ID | 2835 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Counted as a content page | Yes |
| Number of subpages of this page | 0 (0 redirects; 0 non-redirects) |
| Edit | Allow all users (infinite) |
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| Page creator | Pevo (talk | contribs) |
| Date of page creation | 12:55, 28 August 2015 |
| Latest editor | Eves (talk | contribs) |
| Date of latest edit | 16:14, 7 February 2024 |
| Total number of edits | 198 |
| Total number of distinct authors | 3 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
