| Display title | Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/AlN deposition using ALD2 |
| Default sort key | Specific Process Knowledge/Thin film deposition/ALD2 (PEALD)/AlN deposition using ALD2 |
| Page length (in bytes) | 6,941 |
| Namespace ID | 0 |
| Page ID | 3852 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Counted as a content page | Yes |
| Number of subpages of this page | 1 (0 redirects; 1 non-redirect) |
| Edit | Allow all users (infinite) |
| Move | Allow all users (infinite) |
| Page creator | Bghe (talk | contribs) |
| Date of page creation | 13:03, 3 March 2017 |
| Latest editor | Pevo (talk | contribs) |
| Date of latest edit | 12:10, 19 June 2023 |
| Total number of edits | 49 |
| Total number of distinct authors | 5 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
