| Display title | Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE |
| Default sort key | Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)/Silicon Nitride Etch using AOE |
| Page length (in bytes) | 4,670 |
| Namespace ID | 0 |
| Page ID | 1220 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Counted as a content page | Yes |
| Number of subpages of this page | 1 (0 redirects; 1 non-redirect) |
| Edit | Allow all users (infinite) |
| Move | Allow all users (infinite) |
| Page creator | BGE (talk | contribs) |
| Date of page creation | 11:55, 3 January 2012 |
| Latest editor | Bghe (talk | contribs) |
| Date of latest edit | 16:46, 20 December 2022 |
| Total number of edits | 43 |
| Total number of distinct authors | 2 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
