| Display title | File:SiO2 with O2 plasma trenches SEM.png |
| Default sort key | SiO2 with O2 plasma trenches SEM.png |
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| Namespace ID | 6 |
| Namespace | File |
| Page ID | 3800 |
| Page content language | en - English |
| Page content model | wikitext |
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| Hash value | 82ef550c6d7c82511320d57e398bff7ddc1669a2 |
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| Page creator | Tanamp (talk | contribs) |
| Date of page creation | 08:39, 17 January 2017 |
| Latest editor | Tanamp (talk | contribs) |
| Date of latest edit | 08:39, 17 January 2017 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
