| Display title | File:RIE1 SIO2 DOE1 Etch rate.jpg |
| Default sort key | RIE1 SIO2 DOE1 Etch rate.jpg |
| Page length (in bytes) | 59 |
| Namespace ID | 6 |
| Namespace | File |
| Page ID | 432 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Hash value | 8db7d8c7f6b623eecb94eb0874c73b230944419f |
| Edit | Allow all users (infinite) |
| Move | Allow all users (infinite) |
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| Page creator | BGE (talk | contribs) |
| Date of page creation | 10:01, 24 November 2008 |
| Latest editor | BGE (talk | contribs) |
| Date of latest edit | 10:01, 24 November 2008 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
