| Display title | File:PECVD4 HfSiO2 15min.docx |
| Default sort key | PECVD4 HfSiO2 15min.docx |
| Page length (in bytes) | 8 |
| Namespace ID | 6 |
| Namespace | File |
| Page ID | 5356 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Hash value | 2f8120bf77dfd4714547edf726bf1da466e048df |
| Edit | Allow all users (infinite) |
| Move | Allow all users (infinite) |
| Upload | Allow all users (infinite) |
| Page creator | Bghe (talk | contribs) |
| Date of page creation | 11:40, 20 August 2020 |
| Latest editor | Bghe (talk | contribs) |
| Date of latest edit | 11:40, 20 August 2020 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
