| Display title | File:Cluster-based multi-chamber high vacuum sputtering deposition system Acceptance.pptx |
| Default sort key | Cluster-based multi-chamber high vacuum sputtering deposition system Acceptance.pptx |
| Page length (in bytes) | 8 |
| Namespace ID | 6 |
| Namespace | File |
| Page ID | 5037 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Hash value | 2bf8be1800a6802c589f5a5a8af96d3b4bb6ae83 |
| Edit | Allow all users (infinite) |
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| Page creator | Eves (talk | contribs) |
| Date of page creation | 18:27, 22 March 2020 |
| Latest editor | Eves (talk | contribs) |
| Date of latest edit | 18:27, 22 March 2020 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
