| Display title | File:5 Lithography and oxide etch.jpg |
| Default sort key | 5 Lithography and oxide etch.jpg |
| Page length (in bytes) | 53 |
| Namespace ID | 6 |
| Namespace | File |
| Page ID | 1564 |
| Page content language | en - English |
| Page content model | wikitext |
| Indexing by robots | Allowed |
| Number of redirects to this page | 0 |
| Hash value | 97ce1c4256cf7f079c4ec96c02b17c7fcf533fe8 |
| Edit | Allow all users (infinite) |
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| Page creator | Pvl (talk | contribs) |
| Date of page creation | 14:00, 17 December 2012 |
| Latest editor | Pvl (talk | contribs) |
| Date of latest edit | 14:00, 17 December 2012 |
| Total number of edits | 1 |
| Total number of distinct authors | 1 |
| Recent number of edits (within past 90 days) | 0 |
| Recent number of distinct authors | 0 |
