Specific Process Knowledge/Wafer cleaning/Cleaning with Soap Sonic: Revision history

1 February 2023

• curprev 14:1014:10, 1 February 2023‎ Mbec talk contribs‎ 2,539 bytes 0‎ No edit summary
• curprev 11:0911:09, 1 February 2023‎ Mbec talk contribs‎ 2,539 bytes +155‎ No edit summary

5 August 2022

• curprev 13:4913:49, 5 August 2022‎ Mbec talk contribs‎ 2,384 bytes +1‎ →‎Cleaning of samples that have been out of the cleanroom

25 November 2019

• curprev 16:0416:04, 25 November 2019‎ Jmli talk contribs‎ 2,383 bytes 0‎ No edit summary

22 August 2018

• curprev 13:2413:24, 22 August 2018‎ Choi talk contribs‎ 2,383 bytes +64‎ →‎Procedure
• curprev 13:2213:22, 22 August 2018‎ Choi talk contribs‎ 2,319 bytes +191‎ →‎Procedure
• curprev 13:1813:18, 22 August 2018‎ Choi talk contribs‎ 2,128 bytes +143‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 13:1513:15, 22 August 2018‎ Choi talk contribs‎ 1,985 bytes −5‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 13:1313:13, 22 August 2018‎ Choi talk contribs‎ 1,990 bytes −4‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 13:1313:13, 22 August 2018‎ Choi talk contribs‎ 1,994 bytes +2‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:1208:12, 22 August 2018‎ Choi talk contribs‎ 1,992 bytes 0‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:1208:12, 22 August 2018‎ Choi talk contribs‎ 1,992 bytes +208‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:0608:06, 22 August 2018‎ Choi talk contribs‎ 1,784 bytes 0‎ →‎Procedure
• curprev 08:0608:06, 22 August 2018‎ Choi talk contribs‎ 1,784 bytes +59‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:0408:04, 22 August 2018‎ Choi talk contribs‎ 1,725 bytes +10‎ →‎Procedure
• curprev 08:0408:04, 22 August 2018‎ Choi talk contribs‎ 1,715 bytes −4‎ →‎Procedure
• curprev 08:0308:03, 22 August 2018‎ Choi talk contribs‎ 1,719 bytes +35‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:0308:03, 22 August 2018‎ Choi talk contribs‎ 1,684 bytes +9‎ →‎Cleaning of samples that have been out of the cleanroom
• curprev 08:0208:02, 22 August 2018‎ Choi talk contribs‎ 1,675 bytes +556‎ →‎Cleaning of wafers or chips that have been out of the cleanroom

4 April 2016

• curprev 06:4406:44, 4 April 2016‎ Bghe talk contribs‎ 1,119 bytes +134‎ No edit summary

21 October 2013

• curprev 15:0615:06, 21 October 2013‎ Kabi talk contribs‎ 985 bytes 0‎ No edit summary
• curprev 15:0515:05, 21 October 2013‎ Kabi talk contribs‎ 985 bytes −1‎ No edit summary
• curprev 15:0315:03, 21 October 2013‎ Kabi talk contribs‎ 986 bytes +230‎ No edit summary

7 March 2008

• curprev 14:1714:17, 7 March 2008‎ Mbe talk contribs‎ 756 bytes +14‎ →‎Cl[[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room. ]]eaning of wafers or chips that have been out of the cleanroom.

5 March 2008

• curprev 11:4311:43, 5 March 2008‎ Mbe talk contribs‎ 742 bytes −71‎ →‎Cl[[Image:Sonic-clean.jpg|300x300px|thumb|Soap sonic clean placed in the wash bench in the changing room. <br />Wet Etch of Chromium can take place in a beaker in this fume hood]]eaning of wafers or chips that have been out of the cleanroom.
• curprev 11:4211:42, 5 March 2008‎ Mbe talk contribs‎ 813 bytes +19‎ →‎Cl[[Image:fumehoodetch-chrom.jpg|300x300px|thumb|Fume hood: positioned in cleanroom 2. <br />Wet Etch of Chromium can take place in a beaker in this fume hood]]eaning of wafers or chips that have been out of the cleanroom.
• curprev 11:3111:31, 5 March 2008‎ Mbe talk contribs‎ 794 bytes +159‎ →‎Cleaning of wafers or chips that have been out of the cleanroom.

4 March 2008

• curprev 10:0910:09, 4 March 2008‎ BGE talk contribs‎ 635 bytes +1‎ →‎Cleaning of wafers or chips that has been out of the cleanroom.

21 February 2008

• curprev 13:2613:26, 21 February 2008‎ BGE talk contribs‎ 634 bytes +2‎ No edit summary
• curprev 10:0110:01, 21 February 2008‎ BGE talk contribs‎ 632 bytes +74‎ →‎Cleaning of wafers or chips that has been out of the cleanroom.
• curprev 09:5909:59, 21 February 2008‎ BGE talk contribs‎ 558 bytes +4‎ →‎Cleaning of wafers or chips that has been out of the cleanroom.

20 February 2008

• curprev 15:3515:35, 20 February 2008‎ BGE talk contribs‎ 554 bytes +8‎ No edit summary
• curprev 15:3415:34, 20 February 2008‎ BGE talk contribs‎ 546 bytes +146‎ No edit summary
• curprev 15:2915:29, 20 February 2008‎ BGE talk contribs‎ 400 bytes +337‎ No edit summary
• curprev 13:5913:59, 20 February 2008‎ Mbe talk contribs‎ 63 bytes +63‎ New page: Cleaning of wafers or chips that has been out of the cleanroom.