Specific Process Knowledge/Thin film deposition/Si sputter in Wordentec: Revision history

6 June 2023

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27 July 2022

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25 March 2020

• curprev 10:4610:46, 25 March 2020‎ Reet talk contribs‎ 1,951 bytes +96‎ →‎Silicon sputtering in the Wordentec
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19 March 2020

• curprev 14:2014:20, 19 March 2020‎ Reet talk contribs‎ 1,483 bytes +60‎ →‎Silicon sputter
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18 March 2020

• curprev 12:4212:42, 18 March 2020‎ Reet talk contribs‎ 1,160 bytes +425‎ →‎Silicon sputter

15 August 2019

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16 January 2017

• curprev 14:2114:21, 16 January 2017‎ Mdyma talk contribs‎ 684 bytes +1‎ →‎Silicon sputter

2 April 2014

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15 August 2012

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• curprev 13:0913:09, 15 August 2012‎ Kn talk contribs‎ 511 bytes +511‎ New page: == Silicon sputter== Silicon can be deposited in Wordentec. '''Parameters''' Listed below are tried parameters, that can ...