Specific Process Knowledge/Thin film deposition/Deposition of Tungsten: Revision history

1 February 2023

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2 January 2023

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14 December 2022

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14 September 2022

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3 October 2021

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4 September 2018

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19 September 2016

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25 March 2014

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10 March 2014

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7 March 2014

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15 April 2013

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15 August 2011

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5 February 2009

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21 November 2007

• curprev 11:0011:00, 21 November 2007‎ 192.38.87.73 talk‎ 482 bytes +482‎ New page: Tungsten (W) can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam eva...