Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Revision history

28 August 2025

• curprev 09:0109:01, 28 August 2025 Reet talk contribs 5,006 bytes −4 →E-beam evaporation of Tantalum

30 July 2025

• curprev 14:3414:34, 30 July 2025 Eves talk contribs 5,010 bytes 0 →E-beam evaporation of Tantalum
• curprev 14:3314:33, 30 July 2025 Eves talk contribs 5,010 bytes +9 →E-beam evaporation of Tantalum
• curprev 14:3114:31, 30 July 2025 Eves talk contribs 5,001 bytes +1 →Sputtering of Tantalum in Sputter-System Metal-Nitride(PC3)
• curprev 14:3114:31, 30 July 2025 Eves talk contribs 5,000 bytes +274 →Sputtering of Tantalum in Sputter-System (Lesker)
• curprev 14:2914:29, 30 July 2025 Eves talk contribs 4,726 bytes +27 →Sputtering of Tantalum

29 July 2025

• curprev 11:4111:41, 29 July 2025 Eves talk contribs 4,699 bytes +1,244 No edit summary

7 July 2025

• curprev 23:2823:28, 7 July 2025 Reet talk contribs 3,455 bytes +241 →E-beam evaporation of Tantalum
• curprev 23:2623:26, 7 July 2025 Reet talk contribs 3,214 bytes −77 →Sputtering of Tantalum

13 June 2023

• curprev 13:1313:13, 13 June 2023 Reet talk contribs 3,291 bytes +40 →E-beam evaporation of Tantalum

1 February 2023

• curprev 18:0918:09, 1 February 2023 Eves talk contribs 3,251 bytes +86 No edit summary

29 December 2022

• curprev 15:5615:56, 29 December 2022 Eves talk contribs 3,165 bytes −9 →E-beam evaporation of Tantalum

14 December 2022

• curprev 17:4517:45, 14 December 2022 Eves talk contribs 3,174 bytes −2 No edit summary
• curprev 17:4517:45, 14 December 2022 Eves talk contribs 3,176 bytes +39 No edit summary
• curprev 17:4417:44, 14 December 2022 Eves talk contribs 3,137 bytes +245 No edit summary

31 August 2022

• curprev 14:0314:03, 31 August 2022 Paphol talk contribs 2,892 bytes +29 →Tantalum deposition
• curprev 14:0014:00, 31 August 2022 Paphol talk contribs 2,863 bytes +7 →Tantalum deposition
• curprev 13:5913:59, 31 August 2022 Paphol talk contribs 2,856 bytes +488 No edit summary
• curprev 13:5413:54, 31 August 2022 Paphol talk contribs 2,368 bytes 0 No edit summary

25 March 2020

• curprev 12:2912:29, 25 March 2020 Reet talk contribs 2,368 bytes +145 →Tantalum deposition
• curprev 12:2712:27, 25 March 2020 Reet talk contribs 2,223 bytes −2 →Tantalum deposition
• curprev 12:2612:26, 25 March 2020 Reet talk contribs 2,225 bytes +173 →Tantalum deposition
• curprev 12:1412:14, 25 March 2020 Reet talk contribs 2,052 bytes +23 →Tantalum deposition

30 August 2018

• curprev 08:5608:56, 30 August 2018 Reet talk contribs m 2,029 bytes +25 No edit summary

29 August 2018

• curprev 14:0014:00, 29 August 2018 Reet talk contribs 2,004 bytes +401 Alcatel replaced by Temescal

13 March 2017

• curprev 14:2314:23, 13 March 2017 Mdyma talk contribs 1,603 bytes +1 No edit summary

21 October 2014

• curprev 11:2511:25, 21 October 2014 Knil talk contribs 1,602 bytes +7 No edit summary

25 March 2014

• curprev 17:1517:15, 25 March 2014 Knil talk contribs 1,595 bytes +127 No edit summary

10 March 2014

• curprev 10:0510:05, 10 March 2014 Knil talk contribs 1,468 bytes +668 No edit summary

4 April 2013

• curprev 10:3310:33, 4 April 2013 Kn talk contribs 800 bytes +59 No edit summary
• curprev 10:3210:32, 4 April 2013 Kn talk contribs 741 bytes +246 No edit summary

15 August 2011

• curprev 15:4115:41, 15 August 2011 Kn talk contribs 495 bytes −175 No edit summary

5 February 2009

• curprev 15:4115:41, 5 February 2009 BGE talk contribs 670 bytes +120 No edit summary

21 November 2007

• curprev 11:5811:58, 21 November 2007 192.38.87.73 talk 550 bytes +550 New page: Tantalum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam evapora...