Specific Process Knowledge/Thin film deposition/Deposition of Tantalum: Revision history

13 June 2023

• curprev 12:1312:13, 13 June 2023‎ Reet talk contribs‎ 3,291 bytes +40‎ →‎E-beam evaporation of Tantalum

1 February 2023

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29 December 2022

• curprev 14:5614:56, 29 December 2022‎ Eves talk contribs‎ 3,165 bytes −9‎ →‎E-beam evaporation of Tantalum

14 December 2022

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31 August 2022

• curprev 13:0313:03, 31 August 2022‎ Paphol talk contribs‎ 2,892 bytes +29‎ →‎Tantalum deposition
• curprev 13:0013:00, 31 August 2022‎ Paphol talk contribs‎ 2,863 bytes +7‎ →‎Tantalum deposition
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25 March 2020

• curprev 11:2911:29, 25 March 2020‎ Reet talk contribs‎ 2,368 bytes +145‎ →‎Tantalum deposition
• curprev 11:2711:27, 25 March 2020‎ Reet talk contribs‎ 2,223 bytes −2‎ →‎Tantalum deposition
• curprev 11:2611:26, 25 March 2020‎ Reet talk contribs‎ 2,225 bytes +173‎ →‎Tantalum deposition
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30 August 2018

• curprev 07:5607:56, 30 August 2018‎ Reet talk contribs‎ m 2,029 bytes +25‎ No edit summary

29 August 2018

• curprev 13:0013:00, 29 August 2018‎ Reet talk contribs‎ 2,004 bytes +401‎ Alcatel replaced by Temescal

13 March 2017

• curprev 13:2313:23, 13 March 2017‎ Mdyma talk contribs‎ 1,603 bytes +1‎ No edit summary

21 October 2014

• curprev 10:2510:25, 21 October 2014‎ Knil talk contribs‎ 1,602 bytes +7‎ No edit summary

25 March 2014

• curprev 16:1516:15, 25 March 2014‎ Knil talk contribs‎ 1,595 bytes +127‎ No edit summary

10 March 2014

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4 April 2013

• curprev 09:3309:33, 4 April 2013‎ Kn talk contribs‎ 800 bytes +59‎ No edit summary
• curprev 09:3209:32, 4 April 2013‎ Kn talk contribs‎ 741 bytes +246‎ No edit summary

15 August 2011

• curprev 14:4114:41, 15 August 2011‎ Kn talk contribs‎ 495 bytes −175‎ No edit summary

5 February 2009

• curprev 14:4114:41, 5 February 2009‎ BGE talk contribs‎ 670 bytes +120‎ No edit summary

21 November 2007

• curprev 10:5810:58, 21 November 2007‎ 192.38.87.73 talk‎ 550 bytes +550‎ New page: Tantalum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam evapora...