Specific Process Knowledge/Thin film deposition/Deposition of Scandium: Revision history

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9 November 2023

  • curprev 11:5611:56, 9 November 2023‎ Eves talk contribs‎ 992 bytes +992‎ Created page with "'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Scandium&action=submit click here]''' <i> Unless otherwise stated, this page is written by <b>DTU Nanolab internal</b></i> == Deposition of Scandium == Deposition of Sc can only be done by sputtering using 4-inch Sc target. The only tool for this applicatio..."
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