Specific Process Knowledge/Thin film deposition/Deposition of Platinum: Revision history

22 January 2024

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14 September 2023

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9 June 2023

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1 February 2023

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11 January 2022

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3 October 2021

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29 August 2018

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• curprev 12:3812:38, 29 August 2018‎ Reet talk contribs‎ 2,604 bytes +333‎ →‎Platinum deposition: Replaced Alcatel with Temescal and adjusted params

13 March 2017

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12 September 2014

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26 March 2014

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10 March 2014

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7 March 2014

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10 September 2013

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4 March 2013

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19 September 2011

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15 August 2011

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5 February 2009

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21 November 2007

• curprev 10:3610:36, 21 November 2007‎ 192.38.87.73 talk‎ 607 bytes +607‎ New page: Platinum can be deposited by e-beam evaporation. In the chart below you can compare the different deposition equipment. {| border="1" cellspacing="0" cellpadding="4" ! ! E-beam evapora...