Specific Process Knowledge/Thin film deposition/Deposition of Niobium Titanium Nitride: Revision history

8 October 2023

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5 October 2023

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4 October 2023

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• curprev 16:4616:46, 4 October 2023‎ Eves talk contribs‎ 10,512 bytes +10,512‎ Created page with "<i>This page is written by <b>Evgeniy Shkondin @DTU Nanolab</b> if nothing else is stated. <br> All images and photos on this page belongs to <b>DTU Nanolab</b>.<br> The fabrication and characterization described below were conducted in <b>2022 by Evgeniy Shkondin, DTU Nanolab</b>.<br></i> This page presents the results of NbTiN deposition using pulsed DC reactive sputtering in Sputter-System Metal-Nitride(PC3), now commonly known as "Cluster Lesker". The deposition ta..."