Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Revision history

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curprev 15:4115:41, 1 June 2023‎ Reet talk contribs‎ 4,151 bytes +35‎ No edit summary

curprev 13:2813:28, 31 August 2022‎ Paphol talk contribs‎ 4,116 bytes +60‎ →‎Comparison of the methods for deposition of AlN

curprev 10:0710:07, 22 April 2020‎ Reet talk contribs‎ 4,056 bytes +1,304‎ →‎Comparison of the methods for deposition of AlN: Added sputter-system metal-nitride(PC3)

curprev 22:1922:19, 21 April 2020‎ Reet talk contribs‎ 2,752 bytes +24‎ →‎Comparison of the methods for deposition of AlN
curprev 22:1722:17, 21 April 2020‎ Reet talk contribs‎ 2,728 bytes −30‎ added the new cluster sputterer - halfway done

curprev 14:2014:20, 6 April 2020‎ Eves talk contribs‎ 2,758 bytes −6‎ →‎Comparison of the methods for deposition of Silicon Oxide

curprev 18:1218:12, 3 March 2020‎ Eves talk contribs‎ 2,764 bytes +1‎ →‎Deposition of Aluminium Nitride

curprev 10:2510:25, 23 June 2017‎ Pevo talk contribs‎ 2,763 bytes +31‎ →‎Deposition of Aluminium Nitride

curprev 10:3210:32, 22 June 2017‎ Tanamp talk contribs‎ 2,732 bytes +1‎ →‎Comparison of the methods for deposition of Silicon Oxide
curprev 10:2110:21, 22 June 2017‎ Tanamp talk contribs‎ 2,731 bytes +1‎ →‎Comparison of the methods for deposition of Silicon Oxide
curprev 10:0810:08, 22 June 2017‎ Tanamp talk contribs‎ 2,730 bytes +897‎ No edit summary
curprev 09:5709:57, 22 June 2017‎ Tanamp talk contribs‎ 1,833 bytes +117‎ →‎Deposition of Aluminium Nitride

curprev 10:5510:55, 19 September 2016‎ Paphol talk contribs‎ 1,716 bytes −373‎ →‎Only one method at the moment
curprev 10:5110:51, 19 September 2016‎ Paphol talk contribs‎ 2,089 bytes −233‎ →‎Deposition of Aluminium Nitride

curprev 14:2614:26, 2 November 2015‎ Paphol talk contribs‎ 2,322 bytes +17‎ →‎Only one method at the moment
curprev 14:1914:19, 2 November 2015‎ Paphol talk contribs‎ 2,305 bytes +254‎ →‎Only one method at the moment
curprev 13:2213:22, 2 November 2015‎ Bghe talk contribs‎ 2,051 bytes −1‎ →‎Only one method at the moment
curprev 13:2013:20, 2 November 2015‎ Bghe talk contribs‎ 2,052 bytes −1‎ →‎Deposition of Aluminium Nitride

curprev 09:4809:48, 8 October 2015‎ Paphol talk contribs‎ 2,053 bytes +234‎ →‎Deposition of Aluminium Nitride
curprev 09:1109:11, 8 October 2015‎ Paphol talk contribs‎ 1,819 bytes +79‎ →‎Deposition of Aluminium Nitride

curprev 11:1011:10, 7 October 2015‎ Paphol talk contribs‎ 1,816 bytes +1,816‎ Created page with "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= '''Feedback to this page''': '''[mailto:labadviser@danchip.dt..."

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