Specific Process Knowledge/Thin film deposition/Deposition of Aluminium Nitride: Revision history

1 June 2023

• curprev 14:4114:41, 1 June 2023‎ Reet talk contribs‎ 4,151 bytes +35‎ No edit summary

31 August 2022

• curprev 12:2812:28, 31 August 2022‎ Paphol talk contribs‎ 4,116 bytes +60‎ →‎Comparison of the methods for deposition of AlN

22 April 2020

• curprev 09:0709:07, 22 April 2020‎ Reet talk contribs‎ 4,056 bytes +1,304‎ →‎Comparison of the methods for deposition of AlN: Added sputter-system metal-nitride(PC3)

21 April 2020

• curprev 21:1921:19, 21 April 2020‎ Reet talk contribs‎ 2,752 bytes +24‎ →‎Comparison of the methods for deposition of AlN
• curprev 21:1721:17, 21 April 2020‎ Reet talk contribs‎ 2,728 bytes −30‎ added the new cluster sputterer - halfway done

6 April 2020

• curprev 13:2013:20, 6 April 2020‎ Eves talk contribs‎ 2,758 bytes −6‎ →‎Comparison of the methods for deposition of Silicon Oxide

3 March 2020

• curprev 17:1217:12, 3 March 2020‎ Eves talk contribs‎ 2,764 bytes +1‎ →‎Deposition of Aluminium Nitride

23 June 2017

• curprev 09:2509:25, 23 June 2017‎ Pevo talk contribs‎ 2,763 bytes +31‎ →‎Deposition of Aluminium Nitride

22 June 2017

• curprev 09:3209:32, 22 June 2017‎ Tanamp talk contribs‎ 2,732 bytes +1‎ →‎Comparison of the methods for deposition of Silicon Oxide
• curprev 09:2109:21, 22 June 2017‎ Tanamp talk contribs‎ 2,731 bytes +1‎ →‎Comparison of the methods for deposition of Silicon Oxide
• curprev 09:0809:08, 22 June 2017‎ Tanamp talk contribs‎ 2,730 bytes +897‎ No edit summary
• curprev 08:5708:57, 22 June 2017‎ Tanamp talk contribs‎ 1,833 bytes +117‎ →‎Deposition of Aluminium Nitride

19 September 2016

• curprev 09:5509:55, 19 September 2016‎ Paphol talk contribs‎ 1,716 bytes −373‎ →‎Only one method at the moment
• curprev 09:5109:51, 19 September 2016‎ Paphol talk contribs‎ 2,089 bytes −233‎ →‎Deposition of Aluminium Nitride

2 November 2015

• curprev 13:2613:26, 2 November 2015‎ Paphol talk contribs‎ 2,322 bytes +17‎ →‎Only one method at the moment
• curprev 13:1913:19, 2 November 2015‎ Paphol talk contribs‎ 2,305 bytes +254‎ →‎Only one method at the moment
• curprev 12:2212:22, 2 November 2015‎ Bghe talk contribs‎ 2,051 bytes −1‎ →‎Only one method at the moment
• curprev 12:2012:20, 2 November 2015‎ Bghe talk contribs‎ 2,052 bytes −1‎ →‎Deposition of Aluminium Nitride

8 October 2015

• curprev 08:4808:48, 8 October 2015‎ Paphol talk contribs‎ 2,053 bytes +234‎ →‎Deposition of Aluminium Nitride
• curprev 08:1108:11, 8 October 2015‎ Paphol talk contribs‎ 1,819 bytes +79‎ →‎Deposition of Aluminium Nitride

7 October 2015

• curprev 12:1012:10, 7 October 2015‎ Paphol talk contribs‎ 1,740 bytes +25‎ →‎Only one method at the moment
• curprev 12:0412:04, 7 October 2015‎ Paphol talk contribs‎ 1,715 bytes −114‎ No edit summary
• curprev 12:0212:02, 7 October 2015‎ Paphol talk contribs‎ 1,829 bytes −45‎ →‎Deposition of Aluminium Nitride
• curprev 10:2710:27, 7 October 2015‎ Paphol talk contribs‎ 1,874 bytes +9‎ →‎Only one method at the moment
• curprev 10:2410:24, 7 October 2015‎ Paphol talk contribs‎ 1,865 bytes +21‎ →‎Deposition of Aluminium Nitride
• curprev 10:1210:12, 7 October 2015‎ Paphol talk contribs‎ 1,844 bytes +14‎ →‎Deposition of MgB
• curprev 10:1210:12, 7 October 2015‎ Paphol talk contribs‎ 1,830 bytes +14‎ →‎THIS PAGE IS UNDER CONSTRUCTION200px
• curprev 10:1010:10, 7 October 2015‎ Paphol talk contribs‎ 1,816 bytes +1,816‎ Created page with "=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>200px= '''Feedback to this page''': '''[mailto:labadviser@danchip.dt..."