Specific Process Knowledge/Thin film deposition/Deposition of Aluminium/Sputter rates for Al: Revision history

6 June 2023

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9 September 2022

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19 March 2020

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27 July 2018

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29 June 2016

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10 April 2014

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7 April 2014

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6 October 2008

• curprev 13:3513:35, 6 October 2008‎ Kn talk contribs‎ 482 bytes +482‎ New page: == Deposition rate == Depening on the settings (pressure and effect) during the sputtering process, the uniformity and grain size of the deposited layer will be different. The depositio...