Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ZnO deposition using ALD: Revision history

19 June 2023

• curprev 12:0712:07, 19 June 2023‎ Pevo talk contribs‎ 10,049 bytes +51‎ No edit summary

14 September 2022

• curprev 13:5113:51, 14 September 2022‎ Pevo talk contribs‎ 9,998 bytes +4‎ →‎Obsolete - ZnO should now be deposited in ALD2
• curprev 13:5013:50, 14 September 2022‎ Pevo talk contribs‎ 9,994 bytes +96‎ No edit summary

4 March 2022

• curprev 11:4411:44, 4 March 2022‎ Eves talk contribs‎ 9,898 bytes −4‎ →‎ZnO XPS investigation for elemental trace analysis
• curprev 11:4411:44, 4 March 2022‎ Eves talk contribs‎ 9,902 bytes +5‎ →‎ZnO XPS investigation for elemental trace analysis
• curprev 11:4311:43, 4 March 2022‎ Eves talk contribs‎ 9,897 bytes +51‎ →‎ZnO XPS investigation for elemental trace analysis
• curprev 11:4111:41, 4 March 2022‎ Eves talk contribs‎ 9,846 bytes +27‎ →‎SEM images
• curprev 11:4111:41, 4 March 2022‎ Eves talk contribs‎ 9,819 bytes +94‎ →‎SEM images
• curprev 11:3911:39, 4 March 2022‎ Eves talk contribs‎ 9,725 bytes 0‎ →‎ZnO XPS investigation for elemental trace analysis
• curprev 11:3911:39, 4 March 2022‎ Eves talk contribs‎ 9,725 bytes +189‎ →‎Optical functions
• curprev 11:3911:39, 4 March 2022‎ Eves talk contribs‎ 9,536 bytes +189‎ →‎Uniformity across 100 mm wafer
• curprev 11:3811:38, 4 March 2022‎ Eves talk contribs‎ 9,347 bytes +87‎ →‎Deposition rate
• curprev 11:3011:30, 4 March 2022‎ Eves talk contribs‎ 9,260 bytes +86‎ →‎Deposition rate
• curprev 11:1311:13, 4 March 2022‎ Eves talk contribs‎ 9,174 bytes −77‎ No edit summary
• curprev 11:1211:12, 4 March 2022‎ Eves talk contribs‎ 9,251 bytes +5,710‎ No edit summary
• curprev 11:1011:10, 4 March 2022‎ Eves talk contribs‎ 3,541 bytes +179‎ No edit summary

2 April 2020

• curprev 10:1810:18, 2 April 2020‎ Jmli talk contribs‎ 3,362 bytes −22‎ →‎ZnO XPS investigation for elemental trace analysis and deposition on high aspect ratio structures

3 January 2020

• curprev 14:3614:36, 3 January 2020‎ Bghe talk contribs‎ 3,384 bytes 0‎ No edit summary

25 November 2019

• curprev 21:0121:01, 25 November 2019‎ Jmli talk contribs‎ 3,384 bytes 0‎ No edit summary

10 July 2019

• curprev 12:2212:22, 10 July 2019‎ Eves talk contribs‎ 3,384 bytes +1‎ No edit summary
• curprev 12:2212:22, 10 July 2019‎ Eves talk contribs‎ 3,383 bytes −1‎ No edit summary

18 April 2017

• curprev 10:0510:05, 18 April 2017‎ Eves talk contribs‎ 3,384 bytes −2‎ →‎ZnO ALD deposition
• curprev 10:0410:04, 18 April 2017‎ Eves talk contribs‎ 3,386 bytes +2‎ →‎ZnO ALD deposition

21 March 2017

• curprev 11:4011:40, 21 March 2017‎ Bghe talk contribs‎ 3,384 bytes +253‎ No edit summary

20 March 2017

• curprev 12:2712:27, 20 March 2017‎ Eves talk contribs‎ 3,131 bytes −1‎ →‎ZnO standard recipe
• curprev 12:2712:27, 20 March 2017‎ Eves talk contribs‎ 3,132 bytes −1‎ →‎ZnO standard recipe
• curprev 10:2210:22, 20 March 2017‎ Eves talk contribs‎ 3,133 bytes +22‎ →‎ZnO standard recipe
• curprev 10:1310:13, 20 March 2017‎ Eves talk contribs‎ 3,111 bytes −2‎ →‎ZnO XPS investigation for elemental trace analysis and deposition on high aspect ratio structures
• curprev 10:1310:13, 20 March 2017‎ Eves talk contribs‎ 3,113 bytes −2‎ →‎ZnO standard recipe
• curprev 10:1210:12, 20 March 2017‎ Eves talk contribs‎ 3,115 bytes +7‎ →‎ZnO XPS investigation for elemental trace analysis and deposition on high aspect ratio structures
• curprev 10:1110:11, 20 March 2017‎ Eves talk contribs‎ 3,108 bytes +1,311‎ →‎ZnO standard recipe
• curprev 09:5809:58, 20 March 2017‎ Eves talk contribs‎ 1,797 bytes −6,428‎ →‎ZnO standard recipe

16 March 2017

• curprev 19:2819:28, 16 March 2017‎ Eves talk contribs‎ 8,225 bytes −25‎ →‎Al2O3 standard recipe
• curprev 18:3818:38, 16 March 2017‎ Eves talk contribs‎ 8,250 bytes +8,247‎ No edit summary
• curprev 18:3218:32, 16 March 2017‎ Eves talk contribs‎ 3 bytes +3‎ Created page with "ZnO"