Specific Process Knowledge/Thin film deposition/ALD Picosun R200/ZnO deposition using ALD: Revision history

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curprev 13:0713:07, 19 June 2023‎ Pevo talk contribs‎ 10,049 bytes +51‎ No edit summary

curprev 14:5114:51, 14 September 2022‎ Pevo talk contribs‎ 9,998 bytes +4‎ →‎Obsolete - ZnO should now be deposited in ALD2
curprev 14:5014:50, 14 September 2022‎ Pevo talk contribs‎ 9,994 bytes +96‎ No edit summary

curprev 11:1811:18, 2 April 2020‎ Jmli talk contribs‎ 3,362 bytes −22‎ →‎ZnO XPS investigation for elemental trace analysis and deposition on high aspect ratio structures

curprev 15:3615:36, 3 January 2020‎ Bghe talk contribs‎ 3,384 bytes 0‎ No edit summary

curprev 22:0122:01, 25 November 2019‎ Jmli talk contribs‎ 3,384 bytes 0‎ No edit summary

curprev 13:2213:22, 10 July 2019‎ Eves talk contribs‎ 3,384 bytes +1‎ No edit summary
curprev 13:2213:22, 10 July 2019‎ Eves talk contribs‎ 3,383 bytes −1‎ No edit summary

curprev 11:0511:05, 18 April 2017‎ Eves talk contribs‎ 3,384 bytes −2‎ →‎ZnO ALD deposition
curprev 11:0411:04, 18 April 2017‎ Eves talk contribs‎ 3,386 bytes +2‎ →‎ZnO ALD deposition

curprev 12:4012:40, 21 March 2017‎ Bghe talk contribs‎ 3,384 bytes +253‎ No edit summary

curprev 20:2820:28, 16 March 2017‎ Eves talk contribs‎ 8,225 bytes −25‎ →‎Al2O3 standard recipe
curprev 19:3819:38, 16 March 2017‎ Eves talk contribs‎ 8,250 bytes +8,247‎ No edit summary

curprev 19:3219:32, 16 March 2017‎ Eves talk contribs‎ 3 bytes +3‎ Created page with "ZnO"

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