Specific Process Knowledge/Thin film deposition/ALD Picosun R200/Al2O3 deposition using ALD: Revision history

7 February 2024

• curprev 17:1417:14, 7 February 2024‎ Eves talk contribs‎ 26,457 bytes +86‎ →‎Optical functions
• curprev 17:1417:14, 7 February 2024‎ Eves talk contribs‎ 26,371 bytes +86‎ →‎Uniformity across 100 mm wafer
• curprev 17:1417:14, 7 February 2024‎ Eves talk contribs‎ 26,285 bytes +86‎ →‎Deposition characteristics

2 October 2023

• curprev 10:2410:24, 2 October 2023‎ Eves talk contribs‎ 26,199 bytes −1‎ →‎Optical functions

17 April 2023

• curprev 17:3417:34, 17 April 2023‎ Eves talk contribs‎ 26,200 bytes −6‎ →‎Al2O3 ALD deposition using TMA and H2O
• curprev 17:3217:32, 17 April 2023‎ Eves talk contribs‎ 26,206 bytes +12,142‎ No edit summary

4 April 2023

• curprev 15:5015:50, 4 April 2023‎ Eves talk contribs‎ 14,064 bytes 0‎ →‎Al2O3 deposition rates
• curprev 15:4915:49, 4 April 2023‎ Eves talk contribs‎ 14,064 bytes 0‎ →‎Al2O3 deposition rates

2 April 2020

• curprev 11:1311:13, 2 April 2020‎ Jmli talk contribs‎ 14,064 bytes −22‎ →‎Al2O3 XPS investigation for elemental trace analysis

25 November 2019

• curprev 21:2921:29, 25 November 2019‎ Jmli talk contribs‎ 14,086 bytes 0‎ No edit summary

31 July 2018

• curprev 14:4114:41, 31 July 2018‎ Pevo talk contribs‎ 14,086 bytes 0‎ No edit summary

24 May 2016

• curprev 17:3617:36, 24 May 2016‎ Eves talk contribs‎ 14,086 bytes +46‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 17:3617:36, 24 May 2016‎ Eves talk contribs‎ 14,040 bytes −39‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 17:3517:35, 24 May 2016‎ Eves talk contribs‎ 14,079 bytes +39‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 17:3417:34, 24 May 2016‎ Eves talk contribs‎ 14,040 bytes −44‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 17:3417:34, 24 May 2016‎ Eves talk contribs‎ 14,084 bytes +44‎ →‎Al2O3 recipe for deposition on high aspect ratio structures

19 May 2016

• curprev 16:5316:53, 19 May 2016‎ Eves talk contribs‎ 14,040 bytes +22‎ →‎Al2O3 deposition rates
• curprev 12:0212:02, 19 May 2016‎ Eves talk contribs‎ 14,018 bytes +1‎ →‎Al2O3 standard recipe
• curprev 12:0112:01, 19 May 2016‎ Eves talk contribs‎ 14,017 bytes +2‎ →‎Al2O3 standard recipe
• curprev 12:0012:00, 19 May 2016‎ Eves talk contribs‎ 14,015 bytes +544‎ →‎Al2O3 standard recipe
• curprev 11:5311:53, 19 May 2016‎ Eves talk contribs‎ 13,471 bytes +2‎ →‎Al2O3 O3 recipe characterization across 100 mm Si wafer
• curprev 11:5311:53, 19 May 2016‎ Eves talk contribs‎ 13,469 bytes +2‎ →‎Al2O3 O3 process deposition rates
• curprev 11:5211:52, 19 May 2016‎ Eves talk contribs‎ 13,467 bytes +2‎ →‎Al2O3 ozone recipe
• curprev 11:5211:52, 19 May 2016‎ Eves talk contribs‎ 13,465 bytes +2‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 11:5211:52, 19 May 2016‎ Eves talk contribs‎ 13,463 bytes +2‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 11:5211:52, 19 May 2016‎ Eves talk contribs‎ 13,461 bytes +2‎ →‎Al2O3 standard recipe characterization across 100 mm Si wafer
• curprev 11:5211:52, 19 May 2016‎ Eves talk contribs‎ 13,459 bytes +2‎ →‎Al2O3 deposition rates
• curprev 11:5111:51, 19 May 2016‎ Eves talk contribs‎ 13,457 bytes +2‎ →‎Al2O3 standard recipe

18 May 2016

• curprev 17:2617:26, 18 May 2016‎ Eves talk contribs‎ 13,455 bytes +1‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:2517:25, 18 May 2016‎ Eves talk contribs‎ 13,454 bytes +62‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:2217:22, 18 May 2016‎ Eves talk contribs‎ 13,392 bytes +11‎ →‎Al2O3 ozone recipe
• curprev 17:2217:22, 18 May 2016‎ Eves talk contribs‎ 13,381 bytes +11‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 17:2117:21, 18 May 2016‎ Eves talk contribs‎ 13,370 bytes +11‎ →‎Al2O3 standard recipe
• curprev 17:1517:15, 18 May 2016‎ Eves talk contribs‎ 13,359 bytes +316‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:0717:07, 18 May 2016‎ Eves talk contribs‎ 13,043 bytes +1‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:0717:07, 18 May 2016‎ Eves talk contribs‎ 13,042 bytes +110‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:0217:02, 18 May 2016‎ Eves talk contribs‎ 12,932 bytes +14‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 17:0117:01, 18 May 2016‎ Eves talk contribs‎ 12,918 bytes +27‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 16:4516:45, 18 May 2016‎ Eves talk contribs‎ 12,891 bytes −58‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 16:4516:45, 18 May 2016‎ Eves talk contribs‎ 12,949 bytes 0‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 16:4416:44, 18 May 2016‎ Eves talk contribs‎ 12,949 bytes +319‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 15:2815:28, 18 May 2016‎ Eves talk contribs‎ 12,630 bytes +7‎ →‎Al2O3 O3 recipe characterization across 100 mm Si wafer
• curprev 15:2815:28, 18 May 2016‎ Eves talk contribs‎ 12,623 bytes +7‎ →‎Al2O3 O3 process deposition rates
• curprev 15:2815:28, 18 May 2016‎ Eves talk contribs‎ 12,616 bytes +7‎ →‎Al2O3 recipe for deposition on high aspect ratio structures
• curprev 15:2715:27, 18 May 2016‎ Eves talk contribs‎ 12,609 bytes +7‎ →‎Al2O3 XPS investigation for elemental trace analysis
• curprev 15:2715:27, 18 May 2016‎ Eves talk contribs‎ 12,602 bytes +7‎ →‎Al2O3 standard recipe characterization across 100 mm Si wafer
• curprev 15:2715:27, 18 May 2016‎ Eves talk contribs‎ 12,595 bytes +7‎ →‎Al2O3 deposition rates
• curprev 15:1715:17, 18 May 2016‎ Eves talk contribs‎ 12,588 bytes 0‎ →‎Al2O3 standard recipe
• curprev 15:1615:16, 18 May 2016‎ Eves talk contribs‎ 12,588 bytes +39‎ →‎Al2O3 ozone recipe
• curprev 15:1415:14, 18 May 2016‎ Eves talk contribs‎ 12,549 bytes +151‎ →‎Al2O3 ozone recipe