Specific Process Knowledge/Thin film deposition/ALD Picosun R200/AZO deposition using ALD: Revision history

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curprev 19:1819:18, 11 May 2023‎ Eves talk contribs‎ 20,861 bytes −1‎ →‎X-ray diffraction measurements

curprev 09:2409:24, 15 September 2022‎ Pevo talk contribs‎ 20,862 bytes −5‎ →‎Obsolete - AZO should now be deposited in ALD2

curprev 14:5114:51, 14 September 2022‎ Pevo talk contribs‎ 20,867 bytes +79‎ No edit summary

curprev 18:3218:32, 11 September 2022‎ Eves talk contribs‎ 20,788 bytes +398‎ No edit summary

curprev 11:1711:17, 2 April 2020‎ Jmli talk contribs‎ 20,390 bytes −22‎ →‎XPS investigation of AZO thin films

curprev 20:3620:36, 25 November 2019‎ Jmli talk contribs‎ 20,412 bytes 0‎ No edit summary

curprev 13:2313:23, 10 July 2019‎ Eves talk contribs‎ 20,412 bytes +1‎ No edit summary
curprev 13:2213:22, 10 July 2019‎ Eves talk contribs‎ 20,411 bytes −1‎ No edit summary

curprev 11:1211:12, 18 April 2017‎ Eves talk contribs‎ 20,412 bytes +18‎ No edit summary
curprev 11:0911:09, 18 April 2017‎ Eves talk contribs‎ 20,394 bytes +181‎ No edit summary

curprev 12:3912:39, 21 March 2017‎ Bghe talk contribs‎ 20,213 bytes +251‎ No edit summary

curprev 13:0913:09, 20 March 2017‎ Eves talk contribs‎ 19,962 bytes +3,027‎ →‎Electrical properties
curprev 12:3312:33, 20 March 2017‎ Eves talk contribs‎ 16,935 bytes +108‎ →‎Electrical properties
curprev 12:3312:33, 20 March 2017‎ Eves talk contribs‎ 16,827 bytes +1,381‎ →‎X-ray diffraction measurements

curprev 19:2919:29, 16 March 2017‎ Eves talk contribs‎ 6,620 bytes +23‎ →‎AZO deposition rates

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