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Specific Process Knowledge/Thermal Process/Resist Pyrolysis Furnace: Revision history

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curprev 13:0813:08, 6 February 2023‎ Pevo talk contribs‎ 3,963 bytes +50‎ No edit summary

curprev 09:1609:16, 5 October 2021‎ Pevo talk contribs‎ 3,913 bytes −3‎ →‎EXPIRED!!! The Resist Pyrolysis furnace has been removed from the cleanroom August 2019. Use the Multipurpose Anneal furnace instead.

curprev 08:2208:22, 8 August 2019‎ Pevo talk contribs‎ 3,916 bytes +175‎ No edit summary

curprev 12:1912:19, 11 May 2015‎ Pevo talk contribs‎ 3,589 bytes +118‎ →‎Equipment performance and process related parameters
curprev 12:1712:17, 11 May 2015‎ Pevo talk contribs‎ 3,471 bytes +148‎ No edit summary

curprev 14:5214:52, 25 August 2014‎ Bghe talk contribs‎ 3,323 bytes +26‎ No edit summary
curprev 13:3613:36, 25 August 2014‎ Bghe talk contribs‎ 3,297 bytes +112‎ No edit summary

curprev 13:4313:43, 17 February 2014‎ Bghe talk contribs‎ 3,185 bytes +1‎ →‎Resist Pyrolysis Furnace
curprev 13:4313:43, 17 February 2014‎ Bghe talk contribs‎ 3,184 bytes −2‎ →‎Resist Pyrolysis Furnace
curprev 13:4313:43, 17 February 2014‎ Bghe talk contribs‎ 3,186 bytes 0‎ No edit summary

curprev 15:1915:19, 13 February 2014‎ Pevo talk contribs‎ 3,186 bytes +2‎ →‎Equipment performance and process related parameters
curprev 15:1615:16, 13 February 2014‎ Pevo talk contribs‎ 3,184 bytes −19‎ No edit summary
curprev 15:1315:13, 13 February 2014‎ Pevo talk contribs‎ 3,203 bytes 0‎ No edit summary
curprev 15:1315:13, 13 February 2014‎ Pevo talk contribs‎ 3,203 bytes −47‎ →‎Process information

curprev 12:5012:50, 11 October 2013‎ Pevo talk contribs‎ 3,250 bytes +227‎ No edit summary

curprev 08:2708:27, 7 May 2013‎ Pvl talk contribs‎ 3,023 bytes +46‎ →‎Process information

curprev 10:2010:20, 3 December 2012‎ Mdyma talk contribs‎ 2,977 bytes +13‎ →‎Equipment performance and process related parameters
curprev 10:1810:18, 3 December 2012‎ Mdyma talk contribs‎ 2,964 bytes +1‎ →‎Resist Pyrolysis Furnace
curprev 09:4709:47, 3 December 2012‎ Pvl talk contribs‎ 2,963 bytes +4‎ →‎Equipment performance and process related parameters

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