Specific Process Knowledge/Lithography/Resist/NILresist: Revision history

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3 February 2023

26 January 2023

  • curprev 15:1815:18, 26 January 2023‎ Jehem talk contribs‎ 1,384 bytes +28‎ No edit summary
  • curprev 15:1715:17, 26 January 2023‎ Jehem talk contribs‎ 1,356 bytes +1,356‎ Created page with "Here is a table with 2 different imprint resists we have recently used in the cleanroom, with links to a purchase manufactor, technical reports about resist properties and a current process flow, tested in our cleanroom. {|border="1" cellspacing="1" cellpadding="3" style="text-align:left;" width="95%" |- |- |-style="background:silver; color:black" |'''Resist''' |'''Manufacturer''' |'''Comments''' |'''Technical reports''' |'''Thinner''' |'''Spinner''' |'''Rinse''' |'''..."
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