Specific Process Knowledge/Lithography/EBeamLithography/ma-N 2400: Revision history

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31 May 2024

  • curprev 10:4510:45, 31 May 2024‎ Thope talk contribs‎ 680 bytes +680‎ Created page with "=Spin coating= ma-N 2400 can be spin coated on LabSpin 2 and 3 using the CSAR/PMMA bowlset. A spin curve for ma-N 2400.05 is provided below. Process parameters are: *Date: May 31st 2024 *Coater: LabSpin 2 *Substrate: 2" Si *Acceleration: 1000 RPM/s *Time: 60 s *Baking temperature: 90C (setpoint at 100C) *Baking time: 60 s {| style="border: none; border-spacing: 0; margin: 1em auto; text-align: center;" |- | 800px |- | colspan="1" style="t..."
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