Specific Process Knowledge/Lithography/EBeamLithography/ResistBottles: Revision history

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30 January 2023

  • curprev 10:1910:19, 30 January 2023Thope talk contribs 2,241 bytes +2,241 Created page with "= User resist bottles in the cleanroom = 150px|right We recommend all groups or users to have their own bottle of e-beam resist inside the cleanroom. Please follow the guidelines below. * Find a blue-capped glass bottle in the cupboard next to office 055 in 346 (outside the cleanroom). * Bring the bottle inside gowning; clean it thoroughly '''on the outside''' with water or alcohol * Bring the bottle to a fumehood inside the cleanroom; clean the b..."