Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Revision history

16 December 2022

• curprev 11:3411:34, 16 December 2022‎ Thope talk contribs‎ 28,805 bytes −1‎ →‎Calibration during writing (PATH)
• curprev 11:3411:34, 16 December 2022‎ Thope talk contribs‎ 28,806 bytes −11‎ →‎Calibration during writing (PATH)
• curprev 11:3311:33, 16 December 2022‎ Thope talk contribs‎ 28,817 bytes −35‎ →‎Calibration during writing (PATH)
• curprev 11:3011:30, 16 December 2022‎ Thope talk contribs‎ 28,852 bytes +187‎ →‎Calibration during writing (PATH)

14 September 2022

• curprev 16:0316:03, 14 September 2022‎ Thope talk contribs‎ 28,665 bytes +422‎ No edit summary
• curprev 15:2815:28, 14 September 2022‎ Thope talk contribs‎ 28,243 bytes −19‎ No edit summary
• curprev 15:2715:27, 14 September 2022‎ Thope talk contribs‎ 28,262 bytes +188‎ No edit summary

14 July 2021

• curprev 11:2411:24, 14 July 2021‎ Lgpe talk contribs‎ 28,074 bytes +170‎ →‎Troubleshooting

25 November 2019

• curprev 20:2320:23, 25 November 2019‎ Jmli talk contribs‎ 27,904 bytes 0‎ No edit summary

19 September 2019

• curprev 12:0812:08, 19 September 2019‎ Lgpe talk contribs‎ 27,904 bytes +18‎ →‎Alignment and global mark detection

8 August 2017

• curprev 13:4313:43, 8 August 2017‎ Lgpe talk contribs‎ m 27,886 bytes −1‎ →‎Alignment and global mark detection
• curprev 13:3913:39, 8 August 2017‎ Lgpe talk contribs‎ m 27,887 bytes +1‎ →‎Simple sdf and jdf files

6 April 2017

• curprev 13:4313:43, 6 April 2017‎ Lgpe talk contribs‎ m 27,886 bytes +1‎ →‎Alignment and global mark detection
• curprev 13:4213:42, 6 April 2017‎ Lgpe talk contribs‎ m 27,885 bytes +20‎ →‎Simple sdf and jdf files

2 August 2016

• curprev 13:5913:59, 2 August 2016‎ Tigre talk contribs‎ 27,865 bytes −1‎ →‎Calibration during writing (PATH)
• curprev 13:5913:59, 2 August 2016‎ Tigre talk contribs‎ 27,866 bytes +74‎ →‎Calibration during writing (PATH)

18 September 2015

• curprev 13:2513:25, 18 September 2015‎ Tigre talk contribs‎ 27,792 bytes −71‎ →‎Location of sdf and jdf files on the 9500 computer and compiling to mgn
• curprev 13:2413:24, 18 September 2015‎ Tigre talk contribs‎ 27,863 bytes 0‎ →‎location of sdf and jdf files on the 9500 computer and compiling to mgn
• curprev 13:2413:24, 18 September 2015‎ Tigre talk contribs‎ 27,863 bytes +55‎ →‎Compiling to mgn
• curprev 13:2313:23, 18 September 2015‎ Tigre talk contribs‎ 27,808 bytes +158‎ →‎Examples of sdf and jdf files
• curprev 13:2313:23, 18 September 2015‎ Tigre talk contribs‎ 27,650 bytes +166‎ →‎Checking the layout of the final mgn-file
• curprev 13:2313:23, 18 September 2015‎ Tigre talk contribs‎ 27,484 bytes +160‎ →‎Compiling to mgn
• curprev 13:2313:23, 18 September 2015‎ Tigre talk contribs‎ 27,324 bytes +159‎ →‎MULTIPASS and OVERLAP
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 27,165 bytes +159‎ →‎Arrays of arrays
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 27,006 bytes +159‎ →‎Double current exposure
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 26,847 bytes +158‎ →‎Dose variation
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 26,689 bytes +159‎ →‎Alignment and global mark detection
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 26,530 bytes +158‎ →‎Calibration during writing (PATH)
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 26,372 bytes +159‎ →‎Simple sdf and jdf files
• curprev 13:2213:22, 18 September 2015‎ Tigre talk contribs‎ 26,213 bytes +157‎ →‎Preparing sdf and jdf files
• curprev 13:2113:21, 18 September 2015‎ Tigre talk contribs‎ 26,056 bytes −1‎ →‎Converting from GDS to v30 (BEAMER)
• curprev 13:2013:20, 18 September 2015‎ Tigre talk contribs‎ 26,057 bytes +160‎ →‎Converting from GDS to v30 (BEAMER)

28 August 2015

• curprev 13:1313:13, 28 August 2015‎ Tigre talk contribs‎ 25,897 bytes +202‎ No edit summary

18 June 2015

• curprev 10:4310:43, 18 June 2015‎ Tigre talk contribs‎ 25,695 bytes +1,371‎ →‎Examples of sdf and jdf files
• curprev 10:4210:42, 18 June 2015‎ Tigre talk contribs‎ 24,324 bytes +2‎ →‎Compiling to mgn
• curprev 10:4210:42, 18 June 2015‎ Tigre talk contribs‎ 24,322 bytes +12‎ →‎MULTIPASS and OVERLAP
• curprev 10:4110:41, 18 June 2015‎ Tigre talk contribs‎ 24,310 bytes +143‎ →‎MULTIPASS and OVERLAP
• curprev 10:3710:37, 18 June 2015‎ Tigre talk contribs‎ 24,167 bytes +1,104‎ →‎Arrays of arrays
• curprev 10:3510:35, 18 June 2015‎ Tigre talk contribs‎ 23,063 bytes +12‎ →‎Compiling to mgn
• curprev 10:3410:34, 18 June 2015‎ Tigre talk contribs‎ 23,051 bytes +18‎ →‎Examples
• curprev 10:3410:34, 18 June 2015‎ Tigre talk contribs‎ 23,033 bytes −2‎ →‎Checking the layout of the final mgn-file
• curprev 10:3410:34, 18 June 2015‎ Tigre talk contribs‎ 23,035 bytes −2‎ →‎Compiling to mgn
• curprev 10:3310:33, 18 June 2015‎ Tigre talk contribs‎ 23,037 bytes −6‎ →‎Simple sdf and jdf files
• curprev 10:3210:32, 18 June 2015‎ Tigre talk contribs‎ 23,043 bytes +1,117‎ →‎Double current exposure
• curprev 10:3110:31, 18 June 2015‎ Tigre talk contribs‎ 21,926 bytes +15‎ →‎Examples
• curprev 10:3010:30, 18 June 2015‎ Tigre talk contribs‎ 21,911 bytes +120‎ →‎Examples
• curprev 10:2810:28, 18 June 2015‎ Tigre talk contribs‎ 21,791 bytes −99‎ →‎Examples
• curprev 10:2510:25, 18 June 2015‎ Tigre talk contribs‎ 21,890 bytes +1,803‎ →‎Examples
• curprev 10:1910:19, 18 June 2015‎ Tigre talk contribs‎ 20,087 bytes −2‎ →‎Examples
• curprev 10:1910:19, 18 June 2015‎ Tigre talk contribs‎ 20,089 bytes +2‎ No edit summary