Specific Process Knowledge/Lithography/EBeamLithography/EBLProcessExamples: Revision history

26 June 2024

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• curprev 07:5607:56, 26 June 2024‎ Thope talk contribs‎ 4,493 bytes +4‎ →‎SHOT mode
• curprev 07:5607:56, 26 June 2024‎ Thope talk contribs‎ 4,489 bytes +3‎ →‎SHOT mode
• curprev 07:5407:54, 26 June 2024‎ Thope talk contribs‎ 4,486 bytes +18‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 07:4707:47, 26 June 2024‎ Thope talk contribs‎ 4,468 bytes −1‎ →‎Circle arrays by single spot EBL on JEOL 9500 Tag: Manual revert
• curprev 07:4707:47, 26 June 2024‎ Thope talk contribs‎ 4,469 bytes +2‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 07:4707:47, 26 June 2024‎ Thope talk contribs‎ 4,467 bytes −1‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 07:4407:44, 26 June 2024‎ Thope talk contribs‎ 4,468 bytes −1‎ →‎Circle arrays by single spot EBL on JEOL 9500 Tag: Manual revert
• curprev 07:4307:43, 26 June 2024‎ Thope talk contribs‎ 4,469 bytes −1‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 07:4307:43, 26 June 2024‎ Thope talk contribs‎ 4,470 bytes +1‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 07:4307:43, 26 June 2024‎ Thope talk contribs‎ 4,469 bytes +1‎ →‎Circle arrays by single spot EBL on JEOL 9500

22 May 2024

• curprev 15:0515:05, 22 May 2024‎ Thope talk contribs‎ 4,468 bytes +11‎ →‎SHOT mode
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• curprev 13:2713:27, 22 May 2024‎ Thope talk contribs‎ 2,958 bytes −60‎ →‎Small box approach
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• curprev 13:0713:07, 22 May 2024‎ Thope talk contribs‎ 2,807 bytes +48‎ →‎Small box approach
• curprev 13:0113:01, 22 May 2024‎ Thope talk contribs‎ 2,759 bytes +141‎ →‎Circle arrays by single spot EBL on JEOL 9500
• curprev 13:0013:00, 22 May 2024‎ Thope talk contribs‎ 2,618 bytes +4‎ →‎Circle arrays by single spot EBL on JEOL 9500
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• curprev 12:4912:49, 22 May 2024‎ Thope talk contribs‎ 2,025 bytes +17‎ →‎Single spot EBL on JEOL 9500
• curprev 11:5911:59, 22 May 2024‎ Thope talk contribs‎ 2,008 bytes +510‎ →‎Single spot EBL on JEOL 9500
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9 October 2023

• curprev 14:2214:22, 9 October 2023‎ Thope talk contribs‎ 1,075 bytes +232‎ No edit summary

8 September 2023

• curprev 11:5611:56, 8 September 2023‎ Thope talk contribs‎ 843 bytes +12‎ →‎Single spot EBL
• curprev 11:5411:54, 8 September 2023‎ Thope talk contribs‎ 831 bytes +831‎ Created page with "This page is under construction. In time we will fill it with relevant process examples and relevant data. =Single spot EBL= Arrays of circular holes can be created by normal area writing of a mask of circular structures. It can however also be done with a single spot approach, where the beam will dwell at each spot for several µs and hence each spot will become a circular structure by local over exposure. You can read more about this method in the linked article. '''..."