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Specific Process Knowledge/Lithography//UVExposure/aligner inclinedUV: Revision history

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12 January 2026

  • curprev 10:2110:21, 12 January 2026 Jehem talk contribs 2,993 bytes +2,993 Created page with "==Inclined UV Lamp== 300x300px|right|thumb|Inclined UV lamp is placed in CX-1 The Inclined UV lamp is 1000 W Hg(Xe)lamp source designed for near UV, 350-450nm, mid UV, 260-320nm, and deep UV, 220-260nm exposures of resists and polymers. The exposure source can also be used to make an inclined exposure in air or in the media tank. The tool was purchased in February 2009 from Newport. The exposure lamp official name is Oriel Flood Exposure..."
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