Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)/BHF etch rates: Revision history

22 March 2023

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14 February 2023

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31 January 2023

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28 October 2021

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27 October 2021

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25 October 2021

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22 October 2021

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18 March 2020

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5 July 2017

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6 January 2015

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3 October 2014

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26 September 2014

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• curprev 13:2113:21, 26 September 2014‎ Kabi talk contribs‎ 489 bytes +108‎ No edit summary
• curprev 13:0513:05, 26 September 2014‎ Kabi talk contribs‎ 381 bytes +381‎ Created page with " {| border="2" cellspacing="1" cellpadding="5" align="center" !Etch rate in !BHF !5% HF !30% HF |- |Wet Thermal Oxide [nm/min] |78.19 |24.89 |282.85 |- |Silicon Rich Nitride [..."