Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide/By BGHE: Revision history

10 February 2023

• curprev 10:2710:27, 10 February 2023‎ Bghe talk contribs‎ 21,073 bytes +18‎ →‎C4F8
• curprev 10:2510:25, 10 February 2023‎ Bghe talk contribs‎ 21,055 bytes +18‎ No edit summary

18 August 2021

• curprev 15:4715:47, 18 August 2021‎ Bghe talk contribs‎ 21,037 bytes +35‎ No edit summary

26 June 2019

• curprev 10:0910:09, 26 June 2019‎ Bghe talk contribs‎ 21,002 bytes +5‎ No edit summary
• curprev 10:0810:08, 26 June 2019‎ Bghe talk contribs‎ 20,997 bytes +15‎ No edit summary

16 June 2017

• curprev 11:5711:57, 16 June 2017‎ Bghe talk contribs‎ 20,982 bytes −38‎ →‎C4F8 50px
• curprev 11:5611:56, 16 June 2017‎ Bghe talk contribs‎ 21,020 bytes +74‎ →‎C4F8 50px
• curprev 11:5411:54, 16 June 2017‎ Bghe talk contribs‎ 20,946 bytes +1,105‎ →‎C4F8 50px
• curprev 11:4911:49, 16 June 2017‎ Bghe talk contribs‎ 19,841 bytes +1,107‎ →‎C4F8 50px
• curprev 11:4411:44, 16 June 2017‎ Bghe talk contribs‎ 18,734 bytes +21‎ →‎C4F8 50px
• curprev 11:4211:42, 16 June 2017‎ Bghe talk contribs‎ 18,713 bytes +993‎ →‎C4F8 50px
• curprev 11:3811:38, 16 June 2017‎ Bghe talk contribs‎ 17,720 bytes +48‎ →‎C4F8 50px
• curprev 11:3711:37, 16 June 2017‎ Bghe talk contribs‎ 17,672 bytes −12‎ →‎C4F8 50px
• curprev 11:3411:34, 16 June 2017‎ Bghe talk contribs‎ 17,684 bytes +933‎ →‎C4F8 50px
• curprev 11:0111:01, 16 June 2017‎ Bghe talk contribs‎ 16,751 bytes +20‎ →‎C4F8 50px
• curprev 10:5310:53, 16 June 2017‎ Bghe talk contribs‎ 16,731 bytes +301‎ →‎C4F8 50px
• curprev 10:4410:44, 16 June 2017‎ Bghe talk contribs‎ 16,430 bytes +12‎ →‎C4F8 50px
• curprev 10:4310:43, 16 June 2017‎ Bghe talk contribs‎ 16,418 bytes 0‎ →‎C4F8 50px

17 January 2017

• curprev 12:5412:54, 17 January 2017‎ Bghe talk contribs‎ 16,418 bytes +2,082‎ →‎C4F8 50px
• curprev 12:5112:51, 17 January 2017‎ Bghe talk contribs‎ 14,336 bytes +11‎ →‎C4F8 50px

16 January 2017

• curprev 17:5317:53, 16 January 2017‎ Bghe talk contribs‎ 14,325 bytes +267‎ →‎C4F8 50px
• curprev 17:3817:38, 16 January 2017‎ Bghe talk contribs‎ 14,058 bytes +2,300‎ →‎C4F8 50px
• curprev 17:3217:32, 16 January 2017‎ Bghe talk contribs‎ 11,758 bytes +169‎ →‎C4F8 50px
• curprev 17:2817:28, 16 January 2017‎ Bghe talk contribs‎ 11,589 bytes +1,066‎ →‎C4F8 50px
• curprev 17:1917:19, 16 January 2017‎ Bghe talk contribs‎ 10,523 bytes +10‎ →‎C4F8 50px
• curprev 17:0317:03, 16 January 2017‎ Bghe talk contribs‎ 10,513 bytes +211‎ →‎C4F8 50px
• curprev 16:5316:53, 16 January 2017‎ Bghe talk contribs‎ 10,302 bytes −175‎ →‎C4F8 50px
• curprev 16:5116:51, 16 January 2017‎ Bghe talk contribs‎ 10,477 bytes +1,055‎ →‎C4F8 50px
• curprev 16:1816:18, 16 January 2017‎ Bghe talk contribs‎ 9,422 bytes −1‎ →‎C4F8 50px

19 December 2016

• curprev 17:1617:16, 19 December 2016‎ Bghe talk contribs‎ 9,423 bytes +16‎ No edit summary
• curprev 17:1617:16, 19 December 2016‎ Bghe talk contribs‎ 9,407 bytes +4‎ No edit summary
• curprev 17:1617:16, 19 December 2016‎ Bghe talk contribs‎ 9,403 bytes −1‎ No edit summary
• curprev 17:1517:15, 19 December 2016‎ Bghe talk contribs‎ 9,404 bytes +60‎ No edit summary

2 June 2016

• curprev 11:5811:58, 2 June 2016‎ Bghe talk contribs‎ 9,344 bytes +1,172‎ →‎C4F8
• curprev 11:5111:51, 2 June 2016‎ Bghe talk contribs‎ 8,172 bytes +69‎ →‎C4F8
• curprev 11:4511:45, 2 June 2016‎ Bghe talk contribs‎ 8,103 bytes +1,025‎ →‎C4F8
• curprev 11:4111:41, 2 June 2016‎ Bghe talk contribs‎ 7,078 bytes +1,263‎ →‎C4F8
• curprev 11:1811:18, 2 June 2016‎ Bghe talk contribs‎ 5,815 bytes +891‎ →‎C4F8
• curprev 11:1611:16, 2 June 2016‎ Bghe talk contribs‎ 4,924 bytes +952‎ →‎C4F8
• curprev 11:1011:10, 2 June 2016‎ Bghe talk contribs‎ 3,972 bytes +4‎ No edit summary
• curprev 11:0911:09, 2 June 2016‎ Bghe talk contribs‎ 3,968 bytes +1,587‎ →‎C4F8
• curprev 11:0411:04, 2 June 2016‎ Bghe talk contribs‎ 2,381 bytes +174‎ →‎C4F8

30 May 2016

• curprev 15:5415:54, 30 May 2016‎ Bghe talk contribs‎ 2,207 bytes +9‎ →‎CF4
• curprev 15:5315:53, 30 May 2016‎ Bghe talk contribs‎ 2,198 bytes +126‎ →‎CF4

10 May 2016

• curprev 14:0314:03, 10 May 2016‎ Bghe talk contribs‎ 2,072 bytes +113‎ No edit summary

3 May 2016

• curprev 11:3811:38, 3 May 2016‎ Bghe talk contribs‎ 1,959 bytes +1‎ →‎CF4
• curprev 11:3711:37, 3 May 2016‎ Bghe talk contribs‎ 1,958 bytes −3‎ →‎CF4

• curprev 11:3711:37, 3 May 2016‎ Bghe talk contribs‎ 1,961 bytes +1,961‎ Created page with "I tried with two different gas regimes: CF4 and C4F8. I only made a few tests with CF4 since I got a very bad selectivity to the resist mask and I dicided to go for the C4F8 i..."