Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano4: Revision history

24 August 2021

• curprev 16:1816:18, 24 August 2021‎ Jmli talk contribs‎ 2,100 bytes +51‎ No edit summary

10 July 2019

• curprev 10:4910:49, 10 July 2019‎ Jmli talk contribs‎ 2,049 bytes +51‎ No edit summary

27 June 2017

• curprev 11:4211:42, 27 June 2017‎ Jmli talk contribs‎ 1,998 bytes +27‎ →‎The Sinano4.0 recipe

1 June 2015

• curprev 14:1214:12, 1 June 2015‎ Jmli talk contribs‎ 1,971 bytes +33‎ →‎The Sinano4.0 recipe

11 December 2012

• curprev 14:4114:41, 11 December 2012‎ Jml talk contribs‎ 1,938 bytes +1,938‎ Created page with "== The Sinano4.0 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano4.0''' |- ! rowspan="6" align="center"| Recipe | Gas | Cl₂ 20 sccm |- ..."