Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano35: Revision history

24 August 2021

• curprev 15:1715:17, 24 August 2021‎ Jmli talk contribs‎ 2,221 bytes +51‎ No edit summary

10 July 2019

• curprev 09:5009:50, 10 July 2019‎ Jmli talk contribs‎ 2,170 bytes +51‎ No edit summary

27 June 2017

• curprev 10:4510:45, 27 June 2017‎ Jmli talk contribs‎ 2,119 bytes +27‎ →‎The Sinano3.5 recipe
• curprev 10:4410:44, 27 June 2017‎ Jmli talk contribs‎ 2,092 bytes +27‎ No edit summary

1 June 2015

• curprev 13:1513:15, 1 June 2015‎ Jmli talk contribs‎ 2,065 bytes +33‎ →‎The Sinano3.5 recipe

11 December 2012

• curprev 15:2215:22, 11 December 2012‎ Jml talk contribs‎ 2,032 bytes +95‎ →‎The Sinano3.5 recipe
• curprev 13:4113:41, 11 December 2012‎ Jml talk contribs‎ 1,937 bytes +1,937‎ Created page with "== The Sinano3.5 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.5''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."