Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano34: Revision history

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24 August 2021

10 July 2019

27 June 2017

1 June 2015

11 December 2012

  • curprev 14:3914:39, 11 December 2012‎ Jml talk contribs‎ 2,000 bytes +2,000‎ Created page with "== The Sinano3.4 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.4''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl<sub>3</sub> 5 sccm, HB..."
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