Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano32: Revision history

24 August 2021

• curprev 16:1716:17, 24 August 2021‎ Jmli talk contribs‎ 2,222 bytes +51‎ No edit summary

10 July 2019

• curprev 10:5010:50, 10 July 2019‎ Jmli talk contribs‎ 2,171 bytes +51‎ No edit summary

27 June 2017

• curprev 11:4511:45, 27 June 2017‎ Jmli talk contribs‎ 2,120 bytes +27‎ →‎The Sinano3.2 recipe

1 June 2015

• curprev 14:1514:15, 1 June 2015‎ Jmli talk contribs‎ 2,093 bytes +33‎ →‎The Sinano3.2 recipe

11 December 2012

• curprev 16:2316:23, 11 December 2012‎ Jml talk contribs‎ 2,060 bytes +95‎ →‎The Sinano3.2 recipe

• curprev 14:3714:37, 11 December 2012‎ Jml talk contribs‎ 1,965 bytes +1,965‎ Created page with "== The Sinano3.2 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.2''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."