Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano31: Revision history

24 August 2021

• curprev 15:1515:15, 24 August 2021‎ Jmli talk contribs‎ 2,263 bytes +50‎ No edit summary

10 July 2019

• curprev 09:4809:48, 10 July 2019‎ Jmli talk contribs‎ 2,213 bytes +51‎ No edit summary

27 June 2017

• curprev 10:4110:41, 27 June 2017‎ Jmli talk contribs‎ 2,162 bytes +27‎ No edit summary

1 June 2015

• curprev 13:1313:13, 1 June 2015‎ Jmli talk contribs‎ 2,135 bytes +33‎ →‎The Sinano3.1 recipe

11 December 2012

• curprev 15:2015:20, 11 December 2012‎ Jml talk contribs‎ 2,102 bytes +95‎ →‎The Sinano3.1 recipe
• curprev 13:0713:07, 11 December 2012‎ Jml talk contribs‎ 2,007 bytes +2,007‎ Created page with "== The Sinano3.1 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.1''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 3 sccm, HB..."