Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinano3: Revision history

9 August 2022

• curprev 10:2310:23, 9 August 2022‎ Jmli talk contribs‎ 4,137 bytes +39‎ No edit summary

20 January 2020

• curprev 14:0314:03, 20 January 2020‎ Jmli talk contribs‎ 4,098 bytes +28‎ No edit summary

27 June 2017

• curprev 10:4010:40, 27 June 2017‎ Jmli talk contribs‎ 4,070 bytes +27‎ →‎The Sinano3.0 recipe

1 June 2015

• curprev 13:1213:12, 1 June 2015‎ Jmli talk contribs‎ 4,043 bytes +34‎ →‎The Sinano3.0 recipe

11 December 2012

• curprev 13:0613:06, 11 December 2012‎ Jml talk contribs‎ 4,009 bytes +4,009‎ Created page with "== The Sinano3.0 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.0''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."