Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan332: Revision history

9 August 2022

• curprev 10:2210:22, 9 August 2022‎ Jmli talk contribs‎ 4,516 bytes +41‎ No edit summary

20 January 2020

• curprev 14:0414:04, 20 January 2020‎ Jmli talk contribs‎ 4,475 bytes +28‎ No edit summary

27 June 2017

• curprev 10:4110:41, 27 June 2017‎ Jmli talk contribs‎ 4,447 bytes +27‎ No edit summary

1 June 2015

• curprev 13:1313:13, 1 June 2015‎ Jmli talk contribs‎ 4,420 bytes +33‎ →‎The Sinano3.32 recipe

11 December 2012

• curprev 13:4713:47, 11 December 2012‎ Jml talk contribs‎ 4,387 bytes +4,387‎ Created page with "== The Sinano3.32 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.32''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, ..."