Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan331-2: Revision history

24 August 2021

• curprev 15:1615:16, 24 August 2021‎ Jmli talk contribs‎ 4,561 bytes +50‎ No edit summary

10 July 2019

• curprev 09:5109:51, 10 July 2019‎ Jmli talk contribs‎ 4,511 bytes +51‎ No edit summary

27 June 2017

• curprev 10:4610:46, 27 June 2017‎ Jmli talk contribs‎ 4,460 bytes +27‎ →‎The Sinano3.31 recipe

1 June 2015

• curprev 13:1313:13, 1 June 2015‎ Jmli talk contribs‎ 4,433 bytes +33‎ →‎The Sinano3.31 recipe

11 December 2012

• curprev 13:4513:45, 11 December 2012‎ Jml talk contribs‎ 4,400 bytes +4,400‎ Created page with "== The Sinano3.31 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.31''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, ..."