Specific Process Knowledge/Etch/ICP Metal Etcher/silicon/nano/Sinan33-2: Revision history

24 August 2021

• curprev 15:1815:18, 24 August 2021‎ Jmli talk contribs‎ 2,103 bytes +51‎ No edit summary

10 July 2019

• curprev 09:4809:48, 10 July 2019‎ Jmli talk contribs‎ 2,052 bytes +51‎ No edit summary

27 June 2017

• curprev 10:4210:42, 27 June 2017‎ Jmli talk contribs‎ 2,001 bytes +27‎ No edit summary

1 June 2015

• curprev 13:1213:12, 1 June 2015‎ Jmli talk contribs‎ 1,974 bytes +33‎ →‎The Sinano3.3 recipe

11 December 2012

• curprev 13:4313:43, 11 December 2012‎ Jml talk contribs‎ 1,941 bytes +1,941‎ Created page with "== The Sinano3.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe Sinano3.3''' |- ! rowspan="6" align="center"| Recipe | Gas | BCl₃ 5 sccm, HB..."