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Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Revision history

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curprev 12:2212:22, 26 July 2023‎ Bghe talk contribs‎ 4,782 bytes 0‎ →‎Chromium etch in ICP metal - small substrate using carrier
curprev 12:2112:21, 26 July 2023‎ Bghe talk contribs‎ 4,782 bytes +21‎ →‎Chromium etch of hardmask for silicon nitride etching by Anders Simonsen@nbi.ku
curprev 12:1812:18, 26 July 2023‎ Bghe talk contribs‎ 4,761 bytes +5‎ →‎Chromium etch of hardmask for silicon nitride etching by Anders Simonsen@nbi.ku

curprev 15:5915:59, 6 February 2023‎ Bghe talk contribs‎ 4,756 bytes +52‎ →‎Chromium etch of hardmask for silicon nitride etching by Anders Simonsen@nbi.ku
curprev 15:5815:58, 6 February 2023‎ Bghe talk contribs‎ 4,704 bytes +17‎ No edit summary

curprev 13:4413:44, 30 September 2022‎ Bghe talk contribs‎ 3,818 bytes 0‎ →‎Chromium etch of hardmask for silicon nitride etching by Anders Simonsen@nbi.ku

curprev 13:5513:55, 4 March 2022‎ Bghe talk contribs‎ 2,123 bytes +4‎ No edit summary
curprev 13:2013:20, 4 March 2022‎ Bghe talk contribs‎ 2,119 bytes +6‎ →‎Chromium etch in ICP metal - small substrate using carrier
curprev 13:1913:19, 4 March 2022‎ Bghe talk contribs‎ 2,113 bytes +2‎ →‎Chromium etch in ICP metal - small substrate using carrier
curprev 12:5812:58, 4 March 2022‎ Bghe talk contribs‎ 2,111 bytes 0‎ →‎Chromium etch in ICP metal - small substrate using carrier

curprev 15:5015:50, 1 March 2022‎ Bghe talk contribs‎ 2,111 bytes +31‎ →‎Chromium etch in ICP metal - small substrate using carrier
curprev 15:4815:48, 1 March 2022‎ Bghe talk contribs‎ 2,080 bytes +115‎ No edit summary
curprev 15:4615:46, 1 March 2022‎ Bghe talk contribs‎ 1,965 bytes +134‎ No edit summary

curprev 17:0817:08, 25 November 2019‎ Jmli talk contribs‎ 1,831 bytes +1‎ No edit summary

curprev 14:4414:44, 25 January 2019‎ Bghe talk contribs‎ 1,830 bytes 0‎ No edit summary

curprev 11:0311:03, 19 November 2015‎ Bghe talk contribs‎ 1,830 bytes +32‎ →‎Chromium etch in ICP metal
curprev 11:0211:02, 19 November 2015‎ Bghe talk contribs‎ 1,798 bytes +27‎ →‎Chromium etch in ICP metal

curprev 10:0610:06, 14 August 2014‎ Bghe talk contribs‎ 1,771 bytes +6‎ →‎Chromium etch in ICP metal
curprev 10:0510:05, 14 August 2014‎ Bghe talk contribs‎ 1,765 bytes +743‎ →‎Chromium etch in ICP metal

curprev 20:3620:36, 10 December 2012‎ Jml talk contribs‎ 775 bytes +775‎ Created page with "===Chromium etch=== The Chromium etch has ONLY been carried out on the following substrate stack: The Chromium is sputter deposited onto a 2" quartz wafer and pattered by e-be..."

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