Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBSD of Si: Revision history

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curprev 15:4715:47, 6 February 2023‎ Bghe talk contribs‎ 2,459 bytes +14‎ →‎Test of the deposition rate of Silicon and film characteristics
curprev 15:4715:47, 6 February 2023‎ Bghe talk contribs‎ 2,445 bytes +24‎ →‎Test of the deposition rate of Silicon and film characteristics

curprev 14:0914:09, 18 August 2021‎ Bghe talk contribs‎ 2,421 bytes +12‎ No edit summary
curprev 14:0914:09, 18 August 2021‎ Bghe talk contribs‎ 2,409 bytes +1‎ →‎Test of the deposition rate of Silicon and film characteristics
curprev 14:0814:08, 18 August 2021‎ Bghe talk contribs‎ 2,408 bytes +48‎ No edit summary

curprev 09:5409:54, 28 January 2019‎ Bghe talk contribs‎ 2,360 bytes −24‎ No edit summary

curprev 07:4007:40, 5 August 2016‎ Bghe talk contribs‎ 2,384 bytes +838‎ No edit summary
curprev 07:3707:37, 5 August 2016‎ Bghe talk contribs‎ 1,546 bytes +6‎ →‎Recipe
curprev 07:3607:36, 5 August 2016‎ Bghe talk contribs‎ 1,540 bytes +70‎ No edit summary

curprev 08:3208:32, 11 January 2016‎ Bghe talk contribs‎ 1,470 bytes +11‎ →‎Test of the deposition rate and film characteristics

curprev 08:4108:41, 11 October 2013‎ Bghe talk contribs‎ 1,459 bytes +227‎ No edit summary

curprev 12:1712:17, 4 October 2013‎ Bghe talk contribs‎ 1,232 bytes −31‎ →‎Results
curprev 12:1512:15, 4 October 2013‎ Bghe talk contribs‎ 1,263 bytes +311‎ →‎Results

curprev 12:4212:42, 21 March 2012‎ BGE talk contribs‎ 952 bytes −1‎ No edit summary
curprev 12:0512:05, 21 March 2012‎ BGE talk contribs‎ 953 bytes +584‎ No edit summary
curprev 11:4011:40, 21 March 2012‎ BGE talk contribs‎ 369 bytes +369‎ New page: ==Test of the deposition rate and film characteristics== ===Recipe=== {| border="2" cellspacing="1" cellpadding="3" align="left" ! !Recipe 1 |- |Platen angle |10 degrees |- |Platen rotat...

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