Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE process trends: Revision history

24 March 2023

• curprev 14:0014:00, 24 March 2023‎ Bghe talk contribs‎ 3,554 bytes +53‎ →‎General tips for finding etching parameters (given by Oxford Instruments, used with permission)

22 March 2023

• curprev 15:5615:56, 22 March 2023‎ Bghe talk contribs‎ 3,501 bytes +22‎ →‎General tips for finding etching parameters (given by Oxford Instruments)

20 March 2023

• curprev 14:1414:14, 20 March 2023‎ Bghe talk contribs‎ 3,479 bytes −1‎ →‎General tips for finding etching parameters (given by Oxford Instruments)

6 September 2022

• curprev 13:1913:19, 6 September 2022‎ Bghe talk contribs‎ 3,480 bytes +1‎ →‎General tips for finding etching parameters (given by Oxford Instruments)

25 November 2019

• curprev 18:0518:05, 25 November 2019‎ Jmli talk contribs‎ 3,479 bytes +3‎ No edit summary

26 June 2019

• curprev 08:1408:14, 26 June 2019‎ Bghe talk contribs‎ 3,476 bytes +12‎ →‎Some general process trends

29 June 2017

• curprev 08:3908:39, 29 June 2017‎ Bghe talk contribs‎ 3,464 bytes −1‎ →‎Some general process trends

21 July 2015

• curprev 12:0412:04, 21 July 2015‎ Bghe talk contribs‎ 3,465 bytes +42‎ →‎General tips for finding etching parameters (given by Oxford Instruments)
• curprev 12:0112:01, 21 July 2015‎ Bghe talk contribs‎ 3,423 bytes +19‎ →‎Rotation speed
• curprev 12:0012:00, 21 July 2015‎ Bghe talk contribs‎ 3,404 bytes +1,695‎ No edit summary

14 April 2014

• curprev 14:3214:32, 14 April 2014‎ Ajoe talk contribs‎ m 1,709 bytes +4‎ →‎Rotation speed: Fixed some spelling

11 October 2013

• curprev 09:3509:35, 11 October 2013‎ Bghe talk contribs‎ 1,705 bytes +235‎ No edit summary

31 July 2012

• curprev 12:4912:49, 31 July 2012‎ BGE talk contribs‎ 1,470 bytes +197‎ No edit summary
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• curprev 11:4711:47, 31 July 2012‎ BGE talk contribs‎ 790 bytes +349‎ No edit summary
• curprev 11:3611:36, 31 July 2012‎ BGE talk contribs‎ 441 bytes +441‎ New page: =Some general process trends= This page is supposed to gather some general process trends and good advise for designing IBE recipes. ==Etch rate== {| border="2" cellspacing="2" cellpaddin...