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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE magnetic stack etch: Revision history

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curprev 15:3615:36, 6 February 2023‎ Bghe talk contribs‎ 4,769 bytes +5‎ No edit summary
curprev 15:3615:36, 6 February 2023‎ Bghe talk contribs‎ 4,764 bytes +105‎ No edit summary
curprev 15:3415:34, 6 February 2023‎ Bghe talk contribs‎ 4,659 bytes +18‎ →‎Process parameters

curprev 14:4514:45, 18 August 2021‎ Bghe talk contribs‎ 4,641 bytes 0‎ No edit summary

curprev 07:1807:18, 26 June 2019‎ Bghe talk contribs‎ 4,641 bytes +21‎ →‎Conclusions
curprev 07:1707:17, 26 June 2019‎ Bghe talk contribs‎ 4,620 bytes +32‎ →‎Problems with resists stripping after etching
curprev 07:1507:15, 26 June 2019‎ Bghe talk contribs‎ 4,588 bytes +2‎ →‎Problems with resists stripping af etching

curprev 07:3807:38, 29 June 2017‎ Bghe talk contribs‎ 4,586 bytes −28‎ →‎Results of Design of Experiments optimization of magnetic stack etching (Kristian Hagsted Rasmussen spring 2011)

curprev 10:3510:35, 28 May 2015‎ Bghe talk contribs‎ 4,614 bytes +1‎ No edit summary

curprev 14:2714:27, 6 February 2013‎ BGE talk contribs‎ 4,187 bytes +67‎ No edit summary
curprev 14:2114:21, 6 February 2013‎ BGE talk contribs‎ 4,120 bytes −4‎ →‎Design of Experiment results
curprev 14:2114:21, 6 February 2013‎ BGE talk contribs‎ 4,124 bytes +4‎ →‎Design of Experiment results
curprev 14:1914:19, 6 February 2013‎ BGE talk contribs‎ 4,120 bytes +8‎ →‎Some SEM profile images of the etched stacks

curprev 08:0308:03, 13 November 2012‎ Khr talk contribs‎ 2,739 bytes 0‎ →‎Endpoint detection with SIMS
curprev 08:0308:03, 13 November 2012‎ Khr talk contribs‎ 2,739 bytes 0‎ →‎Some SEM profile images of the etched stacks

curprev 10:5610:56, 12 November 2012‎ Khr talk contribs‎ 2,739 bytes −24‎ →‎Process parameters for the acceptance test

curprev 12:5112:51, 8 November 2012‎ Khr talk contribs‎ 2,763 bytes 0‎ →‎Endpoint detection with SIMS
curprev 12:4912:49, 8 November 2012‎ Khr talk contribs‎ 2,763 bytes −1‎ →‎Process parameters for the acceptance test

curprev 07:4207:42, 9 October 2012‎ Khr talk contribs‎ 2,291 bytes +201‎ →‎Process parameters for the acceptance test
curprev 07:4007:40, 9 October 2012‎ Khr talk contribs‎ 2,090 bytes 0‎ No edit summary
curprev 07:3607:36, 9 October 2012‎ Khr talk contribs‎ 2,090 bytes 0‎ No edit summary

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