Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBE Si etch: Revision history

6 February 2023

• curprev 16:3916:39, 6 February 2023‎ Bghe talk contribs‎ 3,289 bytes +5‎ →‎Results for Si etching in the IBE
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5 October 2020

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13 August 2018

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14 December 2015

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23 September 2013

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29 May 2013

• curprev 07:3807:38, 29 May 2013‎ Bghe talk contribs‎ 3,057 bytes +185‎ →‎Results for Si etching in the IBE

10 April 2013

• curprev 09:0909:09, 10 April 2013‎ Khr talk contribs‎ 2,872 bytes +226‎ →‎Some SEM profile images of the etched stacks

6 February 2013

• curprev 15:1415:14, 6 February 2013‎ BGE talk contribs‎ 2,646 bytes +1‎ No edit summary
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• curprev 15:1315:13, 6 February 2013‎ BGE talk contribs‎ 2,640 bytes +1‎ No edit summary
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• curprev 15:1215:12, 6 February 2013‎ BGE talk contribs‎ 2,653 bytes 0‎ →‎Results for Si etching in the IBE
• curprev 15:1015:10, 6 February 2013‎ BGE talk contribs‎ 2,653 bytes −1‎ →‎Some SEM profile images of the etched stacks
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• curprev 15:0715:07, 6 February 2013‎ BGE talk contribs‎ 2,654 bytes +9‎ →‎Results for Si etching in the IBE

10 December 2012

• curprev 10:0110:01, 10 December 2012‎ Khr talk contribs‎ 2,645 bytes +113‎ →‎Contour plots of etch rate and corner angle
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• curprev 09:5309:53, 10 December 2012‎ Khr talk contribs‎ 2,504 bytes +423‎ →‎Some SEM profile images of the etched stacks
• curprev 09:5109:51, 10 December 2012‎ Khr talk contribs‎ 2,081 bytes +15‎ →‎Some SEM profile images of the etched stacks

12 November 2012

• curprev 12:0812:08, 12 November 2012‎ Khr talk contribs‎ 2,066 bytes +424‎ →‎Etch results
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8 November 2012

• curprev 14:3814:38, 8 November 2012‎ Khr talk contribs‎ 584 bytes +3‎ →‎Results for Si etching in the IBE
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14 September 2012

• curprev 10:5410:54, 14 September 2012‎ BGE talk contribs‎ 586 bytes +1‎ →‎Results for Si etching in the IBE
• curprev 10:5410:54, 14 September 2012‎ BGE talk contribs‎ 585 bytes +5‎ →‎Results for Si etching in the IBE
• curprev 10:5410:54, 14 September 2012‎ BGE talk contribs‎ 580 bytes +50‎ →‎Results for Si etching in the IBE

31 July 2012

• curprev 12:5812:58, 31 July 2012‎ BGE talk contribs‎ 530 bytes 0‎ No edit summary
• curprev 12:5712:57, 31 July 2012‎ BGE talk contribs‎ 530 bytes +104‎ →‎results for Si etching in the IBE
• curprev 12:5412:54, 31 July 2012‎ BGE talk contribs‎ 426 bytes +426‎ New page: =results for Si etching in the IBE= Best recipe so fare: {| border="2" cellspacing="2" cellpadding="3" !Parameter !Best Si etching recipe so fare |- |Neutalizer current [mA] |450 |- |RF ...