Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/PolySi mask: Revision history

3 February 2023

• curprev 11:4111:41, 3 February 2023‎ Bghe talk contribs‎ 4,688 bytes +1‎ →‎High etch rate recipe
• curprev 11:4011:40, 3 February 2023‎ Bghe talk contribs‎ 4,687 bytes +17‎ No edit summary

6 September 2022

• curprev 12:2912:29, 6 September 2022‎ Bghe talk contribs‎ 4,670 bytes +1‎ →‎High etch rate recipe

25 November 2019

• curprev 19:1019:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes 0‎ →‎High selectivity to Si-mask recipe
• curprev 19:1019:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes 0‎ →‎Good wafer uniformity recipe
• curprev 19:1019:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes −1‎ →‎Low line width reduction recipe
• curprev 19:0919:09, 25 November 2019‎ Jmli talk contribs‎ 4,670 bytes −2‎ No edit summary

3 January 2018

• curprev 11:2711:27, 3 January 2018‎ Bghe talk contribs‎ 4,672 bytes +10‎ →‎High selectivity to Si-mask recipe

23 January 2017

• curprev 08:3608:36, 23 January 2017‎ Bghe talk contribs‎ 4,662 bytes −1‎ →‎Low line width reduction recipe
• curprev 08:3508:35, 23 January 2017‎ Bghe talk contribs‎ 4,663 bytes −7‎ →‎Low line width reduction recipe

20 January 2017

• curprev 12:4812:48, 20 January 2017‎ Bghe talk contribs‎ 4,670 bytes +147‎ →‎Low line width reduction recipe

24 November 2015

• curprev 09:3809:38, 24 November 2015‎ Bghe talk contribs‎ 4,523 bytes +252‎ No edit summary
• curprev 09:1609:16, 24 November 2015‎ Bghe talk contribs‎ 4,271 bytes +1,073‎ →‎Good wafer uniformity recipe
• curprev 09:1409:14, 24 November 2015‎ Bghe talk contribs‎ 3,198 bytes +1,067‎ No edit summary
• curprev 09:1309:13, 24 November 2015‎ Bghe talk contribs‎ 2,131 bytes +1,118‎ No edit summary
• curprev 09:1209:12, 24 November 2015‎ Bghe talk contribs‎ 1,013 bytes +1,013‎ Created page with "==High etch rate recipe== {| border="2" cellspacing="2" cellpadding="3" |-style="background:Black; color:White" !Parameter |Recipe name: '''SiO2_psi''' ('''SiO2''' etch with ..."