Specific Process Knowledge/Etch/Etching of Silicon Oxide/SiO2 etch using AOE/PolySi mask: Revision history

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curprev 12:4112:41, 3 February 2023‎ Bghe talk contribs‎ 4,688 bytes +1‎ →‎High etch rate recipe
curprev 12:4012:40, 3 February 2023‎ Bghe talk contribs‎ 4,687 bytes +17‎ No edit summary

curprev 13:2913:29, 6 September 2022‎ Bghe talk contribs‎ 4,670 bytes +1‎ →‎High etch rate recipe

curprev 20:1020:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes 0‎ →‎High selectivity to Si-mask recipe
curprev 20:1020:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes 0‎ →‎Good wafer uniformity recipe
curprev 20:1020:10, 25 November 2019‎ Jmli talk contribs‎ 4,669 bytes −1‎ →‎Low line width reduction recipe
curprev 20:0920:09, 25 November 2019‎ Jmli talk contribs‎ 4,670 bytes −2‎ No edit summary

curprev 12:2712:27, 3 January 2018‎ Bghe talk contribs‎ 4,672 bytes +10‎ →‎High selectivity to Si-mask recipe

curprev 09:3609:36, 23 January 2017‎ Bghe talk contribs‎ 4,662 bytes −1‎ →‎Low line width reduction recipe
curprev 09:3509:35, 23 January 2017‎ Bghe talk contribs‎ 4,663 bytes −7‎ →‎Low line width reduction recipe

curprev 13:4813:48, 20 January 2017‎ Bghe talk contribs‎ 4,670 bytes +147‎ →‎Low line width reduction recipe

curprev 10:3810:38, 24 November 2015‎ Bghe talk contribs‎ 4,523 bytes +252‎ No edit summary
curprev 10:1610:16, 24 November 2015‎ Bghe talk contribs‎ 4,271 bytes +1,073‎ →‎Good wafer uniformity recipe
curprev 10:1410:14, 24 November 2015‎ Bghe talk contribs‎ 3,198 bytes +1,067‎ No edit summary
curprev 10:1310:13, 24 November 2015‎ Bghe talk contribs‎ 2,131 bytes +1,118‎ No edit summary

curprev 10:1210:12, 24 November 2015‎ Bghe talk contribs‎ 1,013 bytes +1,013‎ Created page with "==High etch rate recipe== {| border="2" cellspacing="2" cellpadding="3" |-style="background:Black; color:White" !Parameter |Recipe name: '''SiO2_psi''' ('''SiO2''' etch with ..."

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