Specific Process Knowledge/Etch/Etching of Silicon/Si etch using RIE1 or RIE2: Revision history

6 February 2023

• curprev 15:2215:22, 6 February 2023‎ Bghe talk contribs‎ 6,652 bytes +18‎ No edit summary

5 October 2020

• curprev 09:3709:37, 5 October 2020‎ Bghe talk contribs‎ 6,634 bytes 0‎ No edit summary

7 May 2018

• curprev 14:4614:46, 7 May 2018‎ Bghe talk contribs‎ 6,634 bytes +117‎ No edit summary

1 June 2017

• curprev 08:4308:43, 1 June 2017‎ Bghe talk contribs‎ 6,517 bytes +151‎ →‎Most used recipe:

2 June 2015

• curprev 13:5913:59, 2 June 2015‎ Bghe talk contribs‎ 6,366 bytes +31‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load
• curprev 13:4313:43, 2 June 2015‎ Bghe talk contribs‎ 6,335 bytes 0‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load

22 May 2015

• curprev 08:5808:58, 22 May 2015‎ Bghe talk contribs‎ 6,335 bytes +13‎ →‎RIE2:
• curprev 08:5708:57, 22 May 2015‎ Bghe talk contribs‎ 6,322 bytes +126‎ →‎RIE2:

22 April 2014

• curprev 15:2215:22, 22 April 2014‎ Bghe talk contribs‎ 6,196 bytes +20‎ →‎RIE1: OBSOLETE
• curprev 15:1915:19, 22 April 2014‎ Bghe talk contribs‎ 6,176 bytes +116‎ →‎Most used recipe:
• curprev 15:1515:15, 22 April 2014‎ Bghe talk contribs‎ 6,060 bytes +1‎ →‎Etch of small structures
• curprev 15:1515:15, 22 April 2014‎ Bghe talk contribs‎ 6,059 bytes +9‎ →‎RIE1:
• curprev 15:1415:14, 22 April 2014‎ Bghe talk contribs‎ 6,050 bytes +1‎ →‎Etch of small structures
• curprev 15:1315:13, 22 April 2014‎ Bghe talk contribs‎ 6,049 bytes −166‎ →‎Most used recipe:
• curprev 14:0314:03, 22 April 2014‎ Bghe talk contribs‎ 6,215 bytes +10‎ →‎Most used recipe:

27 November 2013

• curprev 16:2416:24, 27 November 2013‎ Pevo talk contribs‎ 6,205 bytes −160‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program, see the QC procedure here):

18 November 2013

• curprev 15:4415:44, 18 November 2013‎ Bghe talk contribs‎ 6,365 bytes +10‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program, see the QC procedure here):
• curprev 15:4015:40, 18 November 2013‎ Bghe talk contribs‎ 6,355 bytes −13‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program, see the QC procedure here):
• curprev 15:3215:32, 18 November 2013‎ Bghe talk contribs‎ 6,368 bytes +959‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program, see the QC procedure here):

23 September 2013

• curprev 13:4613:46, 23 September 2013‎ Bghe talk contribs‎ 5,409 bytes 0‎ No edit summary
• curprev 13:4513:45, 23 September 2013‎ Bghe talk contribs‎ 5,409 bytes +242‎ No edit summary

4 April 2013

• curprev 08:3608:36, 4 April 2013‎ Pvl talk contribs‎ 5,167 bytes −1‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load
• curprev 08:3508:35, 4 April 2013‎ Pvl talk contribs‎ 5,168 bytes +219‎ No edit summary

23 January 2013

• curprev 14:2414:24, 23 January 2013‎ BGE talk contribs‎ 4,949 bytes +6‎ →‎The etch load affects the results
• curprev 12:0312:03, 23 January 2013‎ Pvl talk contribs‎ 4,943 bytes +10‎ →‎The etch load affects the results
• curprev 12:0212:02, 23 January 2013‎ Pvl talk contribs‎ 4,933 bytes +1‎ →‎The mask load affects the results

8 January 2013

• curprev 10:0910:09, 8 January 2013‎ BGE talk contribs‎ 4,932 bytes +89‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

9 October 2012

• curprev 11:5311:53, 9 October 2012‎ Pvl talk contribs‎ 4,843 bytes +40‎ →‎The mask load affects the results
• curprev 11:4211:42, 9 October 2012‎ Pvl talk contribs‎ 4,803 bytes +328‎ →‎The mask load affects the results

2 August 2012

• curprev 13:5113:51, 2 August 2012‎ BGE talk contribs‎ 4,475 bytes −20‎ →‎RIE1:
• curprev 13:5113:51, 2 August 2012‎ BGE talk contribs‎ 4,495 bytes +39‎ →‎RIE1:

5 March 2012

• curprev 09:2309:23, 5 March 2012‎ BGE talk contribs‎ 4,456 bytes −2‎ →‎RIE1:
• curprev 09:2309:23, 5 March 2012‎ BGE talk contribs‎ 4,458 bytes −2‎ →‎RIE2:
• curprev 09:1609:16, 5 March 2012‎ BGE talk contribs‎ 4,460 bytes +3‎ →‎RIE2:
• curprev 09:1509:15, 5 March 2012‎ BGE talk contribs‎ 4,457 bytes +19‎ →‎RIE2:
• curprev 09:1409:14, 5 March 2012‎ BGE talk contribs‎ 4,438 bytes +2‎ →‎RIE1:
• curprev 09:1409:14, 5 March 2012‎ BGE talk contribs‎ 4,436 bytes −2‎ →‎RIE1:
• curprev 09:1209:12, 5 March 2012‎ BGE talk contribs‎ 4,438 bytes −3‎ →‎The mask load affects the results
• curprev 09:0709:07, 5 March 2012‎ BGE talk contribs‎ 4,441 bytes +64‎ No edit summary
• curprev 08:5808:58, 5 March 2012‎ BGE talk contribs‎ 4,377 bytes +20‎ No edit summary

27 November 2009

• curprev 14:0214:02, 27 November 2009‎ BGE talk contribs‎ 4,357 bytes +223‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):
• curprev 13:5713:57, 27 November 2009‎ BGE talk contribs‎ 4,134 bytes 0‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):
• curprev 13:5513:55, 27 November 2009‎ BGE talk contribs‎ 4,134 bytes +56‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

23 April 2008

• curprev 09:5709:57, 23 April 2008‎ BGE talk contribs‎ 4,078 bytes +20‎ →‎RIE2:
• curprev 09:5609:56, 23 April 2008‎ BGE talk contribs‎ 4,058 bytes +19‎ →‎RIE1:
• curprev 09:5309:53, 23 April 2008‎ BGE talk contribs‎ 4,039 bytes +2‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

4 March 2008

• curprev 15:0615:06, 4 March 2008‎ BGE talk contribs‎ 4,037 bytes −327‎ No edit summary
• curprev 15:0515:05, 4 March 2008‎ BGE talk contribs‎ 4,364 bytes +8‎ →‎The silicon substrate:
• curprev 14:4014:40, 4 March 2008‎ BGE talk contribs‎ 4,356 bytes 0‎ →‎The silicon substrate:

4 February 2008

• curprev 16:2316:23, 4 February 2008‎ 192.38.87.76 talk‎ 4,356 bytes +8‎ →‎The mask load affects the results