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Specific Process Knowledge/Etch/Etching of Silicon/Si etch using RIE1 or RIE2: Revision history

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curprev 14:2214:22, 6 February 2023‎ Bghe talk contribs‎ 6,652 bytes +18‎ No edit summary

curprev 08:3708:37, 5 October 2020‎ Bghe talk contribs‎ 6,634 bytes 0‎ No edit summary

curprev 13:4613:46, 7 May 2018‎ Bghe talk contribs‎ 6,634 bytes +117‎ No edit summary

curprev 07:4307:43, 1 June 2017‎ Bghe talk contribs‎ 6,517 bytes +151‎ →‎Most used recipe:

curprev 12:5912:59, 2 June 2015‎ Bghe talk contribs‎ 6,366 bytes +31‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load
curprev 12:4312:43, 2 June 2015‎ Bghe talk contribs‎ 6,335 bytes 0‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load

curprev 07:5807:58, 22 May 2015‎ Bghe talk contribs‎ 6,335 bytes +13‎ →‎RIE2:
curprev 07:5707:57, 22 May 2015‎ Bghe talk contribs‎ 6,322 bytes +126‎ →‎RIE2:

curprev 15:2415:24, 27 November 2013‎ Pevo talk contribs‎ 6,205 bytes −160‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program, see the QC procedure here):

curprev 12:4612:46, 23 September 2013‎ Bghe talk contribs‎ 5,409 bytes 0‎ No edit summary
curprev 12:4512:45, 23 September 2013‎ Bghe talk contribs‎ 5,409 bytes +242‎ No edit summary

curprev 07:3607:36, 4 April 2013‎ Pvl talk contribs‎ 5,167 bytes −1‎ →‎RIE Travka results - Silicon etch rate and profile as function of etch load
curprev 07:3507:35, 4 April 2013‎ Pvl talk contribs‎ 5,168 bytes +219‎ No edit summary

curprev 13:2413:24, 23 January 2013‎ BGE talk contribs‎ 4,949 bytes +6‎ →‎The etch load affects the results
curprev 11:0311:03, 23 January 2013‎ Pvl talk contribs‎ 4,943 bytes +10‎ →‎The etch load affects the results
curprev 11:0211:02, 23 January 2013‎ Pvl talk contribs‎ 4,933 bytes +1‎ →‎The mask load affects the results

curprev 09:0909:09, 8 January 2013‎ BGE talk contribs‎ 4,932 bytes +89‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

curprev 10:5310:53, 9 October 2012‎ Pvl talk contribs‎ 4,843 bytes +40‎ →‎The mask load affects the results
curprev 10:4210:42, 9 October 2012‎ Pvl talk contribs‎ 4,803 bytes +328‎ →‎The mask load affects the results

curprev 12:5112:51, 2 August 2012‎ BGE talk contribs‎ 4,475 bytes −20‎ →‎RIE1:
curprev 12:5112:51, 2 August 2012‎ BGE talk contribs‎ 4,495 bytes +39‎ →‎RIE1:

curprev 13:0213:02, 27 November 2009‎ BGE talk contribs‎ 4,357 bytes +223‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):
curprev 12:5712:57, 27 November 2009‎ BGE talk contribs‎ 4,134 bytes 0‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):
curprev 12:5512:55, 27 November 2009‎ BGE talk contribs‎ 4,134 bytes +56‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

curprev 08:5708:57, 23 April 2008‎ BGE talk contribs‎ 4,078 bytes +20‎ →‎RIE2:
curprev 08:5608:56, 23 April 2008‎ BGE talk contribs‎ 4,058 bytes +19‎ →‎RIE1:
curprev 08:5308:53, 23 April 2008‎ BGE talk contribs‎ 4,039 bytes +2‎ →‎Most used recipe (this recipe is being watched in the in the quality assurance program):

curprev 14:0614:06, 4 March 2008‎ BGE talk contribs‎ 4,037 bytes −327‎ No edit summary
curprev 14:0514:05, 4 March 2008‎ BGE talk contribs‎ 4,364 bytes +8‎ →‎The silicon substrate:
curprev 13:4013:40, 4 March 2008‎ BGE talk contribs‎ 4,356 bytes 0‎ →‎The silicon substrate:

curprev 15:2315:23, 4 February 2008‎ 192.38.87.76 talk‎ 4,356 bytes +8‎ →‎The mask load affects the results

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