Specific Process Knowledge/Etch/DRIE-Pegasus/showerheadchange: Revision history

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curprev 12:2512:25, 28 April 2023‎ Jmli talk contribs‎ 12,264 bytes −61‎ →‎Modification of showerhead on Pegasus 1 in december 2014
curprev 12:2512:25, 28 April 2023‎ Jmli talk contribs‎ 12,325 bytes −146‎ →‎Motivation

curprev 16:1016:10, 2 February 2023‎ Jmli talk contribs‎ 12,471 bytes +78‎ No edit summary

curprev 11:2611:26, 9 August 2022‎ Jmli talk contribs‎ 12,393 bytes +38‎ No edit summary

curprev 12:3412:34, 18 March 2020‎ Jmli talk contribs‎ 12,355 bytes +8‎ →‎Motivation

curprev 12:4612:46, 30 July 2018‎ Jmli talk contribs‎ 12,347 bytes +26‎ →‎Motivation

curprev 10:5710:57, 14 May 2018‎ Jmli talk contribs‎ 11,816 bytes +267‎ No edit summary

curprev 13:4913:49, 16 October 2017‎ Jmli talk contribs‎ 11,549 bytes −5,062‎ →‎Polysilicon etch

curprev 17:1217:12, 19 January 2015‎ Jmli talk contribs‎ 16,087 bytes +16‎ →‎Process D

curprev 11:5211:52, 19 December 2014‎ Jmli talk contribs‎ 12,393 bytes −3‎ →‎Process D

curprev 14:4914:49, 16 December 2014‎ Jmli talk contribs‎ 9,013 bytes 0‎ →‎Comparison of switched processes

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