Specific Process Knowledge/Etch/DRIE-Pegasus/processD: Revision history

2 February 2023

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9 August 2022

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18 March 2020

• curprev 11:2611:26, 18 March 2020‎ Jmli talk contribs‎ 8,150 bytes +43‎ →‎Effects on Process D of showerhead change in December 2014
• curprev 11:2411:24, 18 March 2020‎ Jmli talk contribs‎ 8,107 bytes +573‎ →‎Effects on Process D of showerhead change in December 2014

14 May 2018

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2 June 2016

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• curprev 09:0709:07, 2 June 2016‎ Jmli talk contribs‎ 7,202 bytes +5,584‎ →‎Process optimization 70px

13 May 2015

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3 October 2013

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19 February 2013

• curprev 09:3309:33, 19 February 2013‎ BGE talk contribs‎ 1,303 bytes +82‎ No edit summary

5 July 2011

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• curprev 13:1913:19, 5 July 2011‎ Jml talk contribs‎ 1,069 bytes +15‎ No edit summary
• curprev 13:1113:11, 5 July 2011‎ Jml talk contribs‎ 1,054 bytes +9‎ No edit summary
• curprev 11:5611:56, 5 July 2011‎ Jml talk contribs‎ 1,045 bytes −268‎ No edit summary
• curprev 10:1410:14, 5 July 2011‎ Jml talk contribs‎ 1,313 bytes +1,313‎ New page: {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Process A specifications''' |- ! Parameter ! Specification ! Average result |- ! Etch rate (µm/min) | > 1...