Specific Process Knowledge/Etch/DRIE-Pegasus/processC: Revision history

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curprev 12:0212:02, 28 June 2023‎ Jmli talk contribs‎ 1,813 bytes −5‎ No edit summary
curprev 12:0212:02, 28 June 2023‎ Jmli talk contribs‎ 1,818 bytes +6‎ →‎Process C

curprev 14:4314:43, 2 February 2023‎ Jmli talk contribs‎ 1,812 bytes +77‎ No edit summary

curprev 08:1908:19, 10 August 2021‎ Jmli talk contribs‎ 1,735 bytes −1‎ →‎Process C
curprev 08:1808:18, 10 August 2021‎ Jmli talk contribs‎ 1,736 bytes −1‎ →‎Process C

curprev 16:4916:49, 25 November 2019‎ Jmli talk contribs‎ 1,737 bytes +3‎ No edit summary

curprev 09:4609:46, 29 January 2019‎ Bghe talk contribs‎ 1,734 bytes +101‎ →‎Process C

curprev 09:5809:58, 14 May 2018‎ Jmli talk contribs‎ 1,633 bytes +1‎ No edit summary

curprev 10:1610:16, 2 February 2016‎ Jmli talk contribs‎ 1,632 bytes +49‎ No edit summary

curprev 15:2915:29, 3 October 2013‎ Jmli talk contribs‎ 1,583 bytes +215‎ No edit summary

curprev 15:0215:02, 13 December 2012‎ Jml talk contribs‎ 1,368 bytes 0‎ No edit summary

curprev 12:0012:00, 26 November 2012‎ Jml talk contribs‎ 1,368 bytes +272‎ No edit summary

curprev 11:4311:43, 5 July 2011‎ Jml talk contribs‎ 1,096 bytes −393‎ No edit summary
curprev 10:5110:51, 5 July 2011‎ Jml talk contribs‎ 1,489 bytes +176‎ No edit summary
curprev 10:1410:14, 5 July 2011‎ Jml talk contribs‎ 1,313 bytes +1,313‎ New page: {| border="2" cellpadding="2" cellspacing="1" style="text-align:center;" |+ '''Process A specifications''' |- ! Parameter ! Specification ! Average result |- ! Etch rate (µm/min) | > 1...

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2 February 2023

10 August 2021

25 November 2019

29 January 2019

14 May 2018

2 February 2016

3 October 2013

13 December 2012

26 November 2012

5 July 2011