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Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Revision history

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curprev 14:5114:51, 23 May 2024‎ Jmli talk contribs‎ 34,160 bytes +2‎ →‎Quality control procedure
curprev 14:4714:47, 23 May 2024‎ Jmli talk contribs‎ 34,158 bytes 0‎ →‎Quality control procedure

curprev 11:5211:52, 28 June 2023‎ Jmli talk contribs‎ 34,158 bytes −161‎ →‎Process A acceptance test
curprev 11:5111:51, 28 June 2023‎ Jmli talk contribs‎ 34,319 bytes −4‎ No edit summary
curprev 11:4311:43, 28 June 2023‎ Jmli talk contribs‎ 34,323 bytes +80‎ →‎Process A acceptance test

curprev 14:4114:41, 2 February 2023‎ Jmli talk contribs‎ 34,243 bytes +77‎ No edit summary
curprev 14:4114:41, 2 February 2023‎ Jmli talk contribs‎ 34,166 bytes +77‎ →‎Process A acceptance test

curprev 14:2314:23, 2 October 2020‎ Jmli talk contribs‎ 33,671 bytes 0‎ No edit summary
curprev 14:1314:13, 2 October 2020‎ Jmli talk contribs‎ 33,671 bytes +51‎ No edit summary

curprev 14:2314:23, 2 July 2018‎ Jmli talk contribs‎ 33,620 bytes −2‎ →‎Effects on Process A of showerhead change in December 2014

curprev 18:3518:35, 1 July 2018‎ Jmli talk contribs‎ 33,622 bytes −320‎ →‎Standard Process A 110 cycles
curprev 18:3418:34, 1 July 2018‎ Jmli talk contribs‎ 33,942 bytes +10,692‎ →‎Results: SEM images of trench cross sections
curprev 18:3018:30, 1 July 2018‎ Jmli talk contribs‎ 23,250 bytes +53‎ →‎Results: Etched depths in trenches of different widths

curprev 12:1112:11, 26 June 2018‎ Jmli talk contribs‎ 23,197 bytes −2,255‎ →‎Process A variations May-June 2016
curprev 12:1012:10, 26 June 2018‎ Jmli talk contribs‎ 25,452 bytes −2‎ →‎Results: Optical images
curprev 12:0912:09, 26 June 2018‎ Jmli talk contribs‎ 25,454 bytes +12,704‎ →‎Results: Etched depths in trenches of different widths

curprev 11:4311:43, 22 June 2016‎ Jmli talk contribs‎ 12,750 bytes +6‎ →‎Process A variations May-June 2016

curprev 08:4108:41, 3 June 2016‎ Jmli talk contribs‎ 10,493 bytes +3,301‎ →‎Process A
curprev 08:4008:40, 3 June 2016‎ Jmli talk contribs‎ 7,192 bytes −3,285‎ →‎Effects on Process A of showerhead change in December 2014

curprev 09:0009:00, 2 June 2016‎ Jmli talk contribs‎ 10,477 bytes −1‎ →‎Effects on Process A of showerhead change in December 2014
curprev 08:5508:55, 2 June 2016‎ Jmli talk contribs‎ 10,478 bytes +70‎ →‎Effects on Process A of showerhead change in December 2014
curprev 08:5208:52, 2 June 2016‎ Jmli talk contribs‎ 10,408 bytes +112‎ →‎Effects on Process A of showerhead change in December 2014

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