Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano143: Revision history

2 February 2023

• curprev 16:1616:16, 2 February 2023‎ Jmli talk contribs‎ 2,332 bytes +77‎ No edit summary

5 October 2020

• curprev 09:2509:25, 5 October 2020‎ Jmli talk contribs‎ 2,255 bytes +52‎ No edit summary

30 July 2018

• curprev 13:4313:43, 30 July 2018‎ Jmli talk contribs‎ 2,203 bytes 0‎ No edit summary

3 February 2016

• curprev 16:2716:27, 3 February 2016‎ Jmli talk contribs‎ 2,203 bytes +50‎ No edit summary

22 October 2013

• curprev 12:3612:36, 22 October 2013‎ Jmli talk contribs‎ 2,153 bytes +224‎ No edit summary

10 May 2011

• curprev 14:4914:49, 10 May 2011‎ Jml talk contribs‎ 1,929 bytes +894‎ →‎The nano1.43 recipe

9 May 2011

• curprev 09:3509:35, 9 May 2011‎ Jml talk contribs‎ 1,035 bytes +1,035‎ New page: == The nano1.43 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.43''' |- ! rowspan="6" align="center"| Recipe | Gas | C₄F₈ 75 sccm, SF<su...